Abstract: Techniques are provided herein to form semiconductor devices that have their semiconductor subfins removed and replaced with one or more dielectric materials. A semiconductor device includes a gate structure around or otherwise on a semiconductor region. A lower end of the semiconductor material includes a subfin adjacent to a dielectric layer that acts as shallow trench isolation (STI) between semiconductor devices. A backside process may be performed to remove the bulk substrate and expose a bottom surface of the subfin. The subfin may then be removed from the backside to form backside recesses. A dielectric liner may be formed within the backside recesses and a dielectric fill may be formed within a remaining volume of the backside recesses. Replacing the subfins with dielectric materials may lower parasitic capacitance between the subfins and the gate electrodes as well as reduce parasitic current between adjacent source or drain regions.

Abstract: Techniques are provided herein to form semiconductor devices that have their semiconductor subfins removed and replaced with one or more dielectric materials. A semiconductor device includes a gate structure around or otherwise on a semiconductor region. A lower end of the semiconductor material includes a subfin adjacent to a dielectric layer that acts as shallow trench isolation (STI) between semiconductor devices. A backside process may be performed to remove the bulk substrate and expose a bottom surface of the subfin. The subfin may then be removed from the backside to form backside recesses. A dielectric liner may be formed within the backside recesses and a dielectric fill may be formed within a remaining volume of the backside recesses. Replacing the subfins with dielectric materials may lower parasitic capacitance between the subfins and the gate electrodes as well as reduce parasitic current between adjacent source or drain regions.

Abstract: A key fob for a vehicle has a first end that is used as a key for insertion into a vehicle ignition receptacle and a second end that defines an opening for internal storage of a separate, removable key. While the key fob will remotely unlock the vehicle doors and start the vehicle engine when turned in the vehicle ignition, the removable key is an auxiliary, mechanical access key that may be used on door locks and interior storage compartments. The key fob will not unlock interior storage compartments and the removable key will not sustain operation of the vehicle engine.

Abstract: A key fob for a vehicle has a first end that is used as a key for insertion into a vehicle ignition receptacle and a second end that defines an opening for internal storage of a separate, removable key. While the key fob will remotely unlock the vehicle doors and start the vehicle engine when turned in the vehicle ignition, the removable key is an auxiliary, mechanical access key that may be used on door locks and interior storage compartments. The key fob will not unlock interior storage compartments and the removable key will not sustain operation of the vehicle engine.