Patents by Inventor Timothy M. McEntee

Timothy M. McEntee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition and planarizing methods and apparatus
    Patent number: 4756810
    Abstract: A layer of a substance such as an aluminum alloy is deposited, preferably by sputtering, onto a surface of a substrate such as a semiconductor wafer. The deposited substance is redistributed by bombarding the layer with ions. The ion bombardment may be induced by applying low frequency RF excitation at about 5 KHz -1 MHz to the substrate.
    Type: Grant
    Filed: December 4, 1986
    Date of Patent: July 12, 1988
    Assignee: Machine Technology, Inc.
    Inventors: Lawrence T. Lamont, Jr., Roderick C. Mosely, Timothy M. McEntee