Abstract: A compound of the general formula R1MR4R5R6 is provided where R1 is a partially or fully fluorinated aryl, alkyl, alkenyl or alkynyl group, wherein M is selected from group 14 of the periodic table, wherein R4, R5 and R6 are independently an alkoxy group OR3 or a halogen group X—except, a) where R4, R5 and R6 are each ethoxy, M is Si and R1 is perfluorinated phenyl or perfluorinated vinyl; b) where R4 is ethoxy, R5 and R6 are chlorine, M is Si, and R1 is perfluorinated phenyl; or c) where R4, R5 and R6 are chlorine, M is Si, and R1 is perfluorinated phenyl, perfluorinated methyl or perfluorinated vinyl. This compound formed can be further reacted to attach an additional organic R group, and/or hydrolyzed, alone or with one or more similar compounds, to form a material having a molecular weight of from 500 to 10,000, which material can be deposited on various substrates as a coating or deposited and patterned for a waveguide or other optical device components.

Abstract: A method comprises reacting a compound of the general formula R14-mMOR3m wherein m is an integer from 2 to 4, OR3 is an alkoxy group, and M is an element selected from group 14 of the periodic table; with a compound of the general formula R2X2+Mg, wherein X2 is Br or I; where R1 and R2 are independently selected from alkyl, alkenyl, aryl, alkynyl, or epoxy, and wherein at least one of R1 and R2 is partially or fully fluorinated; so as to make a compound of the general formula R2R14-mMOR3m-1; followed by reacting R2R14-mMOR3m-1 with a halogen or halogen compound in order to replace one or more OR3 groups with a halogen group so as to form R2R14-mMOR3m-1-nXn, where X is a halogen and n is from 1 to 3 and m<n—except where R1 is fluorinated phenyl, M is Si and OR3 is ethoxy.