Patents by Inventor Ting-Chu Lin

Ting-Chu Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240162083
    Abstract: The present disclosure relates to a method for forming a semiconductor device includes forming an opening between first and second sidewalls of respective first and second terminals. The first and second sidewalls oppose each other. The method further includes depositing a first dielectric material at a first deposition rate on top portions of the opening and depositing a second dielectric material at a second deposition rate on the first dielectric material and on the first and second sidewalls. The second dielectric material and the first and second sidewalls entrap a pocket of air. The method also includes performing a treatment process on the second dielectric material.
    Type: Application
    Filed: January 24, 2024
    Publication date: May 16, 2024
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Shuen-Shin LIANG, Chen-Han WANG, Keng-Chu LIN, Tetsuji UENO, Ting-Ting CHEN
  • Publication number: 20240105770
    Abstract: Embodiments disclosed herein include transistors and methods of forming transistors. In an embodiment, a transistor comprises a source, a drain, and a pair of spacers between the source and the drain. In an embodiment, a semiconductor channel is between the source and the drain, where the semiconductor channel passes through the pair of spacers. In an embodiment, the semiconductor channel has a first thickness within the pair of spacers and a second thickness between the pair of spacers, where the second thickness is less than the first thickness. In an embodiment, the transistor further comprises a gate stack over the semiconductor channel between the pair of spacers.
    Type: Application
    Filed: September 27, 2022
    Publication date: March 28, 2024
    Inventors: Tao CHU, Guowei XU, Chia-Ching LIN, Minwoo JANG, Feng ZHANG, Ting-Hsiang HUNG
  • Publication number: 20240105718
    Abstract: Methods for fabricating an integrated circuit (IC) device with a protection liner between doped semiconductor regions are provided. An example IC device includes a channel material having a first face and a second face opposite the first face, a first doped region and a second doped region in the channel material, extending from the second face towards the first face by a first distance; and an insulator structure in a portion of the channel material between the first and second doped regions, the insulator structure extending from the second face towards the first face by a second distance greater than the first distance. The insulator structure includes a first portion between the second face and the first distance and a second portion between first distance and the second distance. The insulator structure includes a liner material on sidewalls of the first portion but absent on sidewalls of the second portion.
    Type: Application
    Filed: September 22, 2022
    Publication date: March 28, 2024
    Applicant: Intel Corporation
    Inventors: Tao Chu, Guowei Xu, Minwoo Jang, Yanbin Luo, Feng Zhang, Ting-Hsiang Hung, Chia-Ching Lin
  • Publication number: 20240088265
    Abstract: Techniques are provided herein to form semiconductor devices having epitaxial growth laterally extending between inner spacer structures to mitigate issues caused by the inner spacer structures either being too thick or too thin. A directional etch is performed along the side of a multilayer fin to create a relatively narrow opening for a source or drain region to increase the usable fin space for forming the inner spacer structures. After the inner spacer structures are formed around ends of the semiconductor layers within the fin, the exposed ends of the semiconductor layers are laterally recessed inwards from the outermost sidewalls of the inner spacer structures. Accordingly, the epitaxial source or drain region is grown from the recessed semiconductor ends and thus fills in the recessed regions between the spacer structures.
    Type: Application
    Filed: September 8, 2022
    Publication date: March 14, 2024
    Applicant: Intel Corporation
    Inventors: Tao Chu, Guowei Xu, Feng Zhang, Ting-Hsiang Hung, Chia-Ching Lin
  • Publication number: 20240088292
    Abstract: Fin trim plug structures with metal for imparting channel stress are described. In an example, an integrated circuit structure includes a fin including silicon, the fin having a top and sidewalls, wherein the top has a longest dimension along a direction. A first isolation structure is over a first end of the fin. A gate structure including a gate electrode is over the top of and laterally adjacent to the sidewalls of a region of the fin. The gate structure is spaced apart from the first isolation structure along the direction. A second isolation structure is over a second end of the fin, the second end opposite the first end, the second isolation structure spaced apart from the gate structure along the direction. The first isolation structure and the second isolation structure both include a dielectric material laterally surrounding an isolated metal structure.
    Type: Application
    Filed: September 8, 2022
    Publication date: March 14, 2024
    Inventors: Tao CHU, Feng ZHANG, Minwoo JANG, Yanbin LUO, Chia-Ching LIN, Ting-Hsiang HUNG
  • Publication number: 20240088217
    Abstract: Techniques are provided herein to form semiconductor devices that include a layer across an upper surface of a dielectric fill between devices and configured to prevent or otherwise reduce recessing of the dielectric fill. In this manner, the layer may be referred to as a barrier layer or recess-inhibiting layer. The semiconductor regions of the devices extend above a subfin region that may be native to the substrate. These subfin regions are separated from one another using a dielectric fill that acts as a shallow trench isolation (STI) structure to electrically isolate devices from one another. A barrier layer is formed over the dielectric fill early in the fabrication process to prevent or otherwise reduce the dielectric fill from recessing during subsequent processing. The layer may include oxygen and a metal, such as aluminum.
    Type: Application
    Filed: September 8, 2022
    Publication date: March 14, 2024
    Applicant: Intel Corporation
    Inventors: Tao Chu, Minwoo Jang, Chia-Ching Lin, Yanbin Luo, Ting-Hsiang Hung, Feng Zhang, Guowei Xu
  • Publication number: 20160090212
    Abstract: The present invention is related to a bag structure. The bag structure comprises a front panel, two lateral panels, a bottom panel, and a rear panel, and all panels join together to form the bag. Two lateral edges of the bottom panel have an extension flap for joining to the lateral panel, respectively, and a valley fold portion is between the bottom panel and the extension flap. After the bag structure is folded, the bag structure has a one-piece bottom and the flat front and rear panels, thereby having attractive appearance and strong structure and being flat when stacked.
    Type: Application
    Filed: September 30, 2014
    Publication date: March 31, 2016
    Inventor: TING-CHU LIN
  • Publication number: 20100059577
    Abstract: A packing box includes a first triangular lateral board part, an upper board part, a bottom board part, a covering board part, and a second triangular lateral board part, which includes upper and lower parts; when the packing box is in a spread-out position, it has a first sticking plate lying between the first triangular lateral board part and the bottom board part; the first sticking plate joins the first triangular lateral board part and the bottom board part together, and therefore can prevent the covering board part from being folded along a middle portion when one is folding and erecting the packing box; therefore, folds won't be formed on the covering board part to spoil the appearance.
    Type: Application
    Filed: September 10, 2008
    Publication date: March 11, 2010
    Inventors: Yu-Chun Lin, Ting-Chu Lin