Abstract: Apparatus, systems, and methods for conducting a hardmask (e.g., carbon containing hardmask) removal process on a workpiece are provided. In one example implementation, a process can include admitting a process gas into a plasma chamber, generating a plasma in the plasma chamber from the process gas using an inductively coupled plasma source, and exposing the carbon containing hardmask to the plasma to remove at least a portion of the carbon containing hardmask. The process gas can include a sulfur containing gas. The process gas does not include a halogen containing gas. The inductively coupled plasma source can be separated from the plasma chamber by a grounded electrostatic shield to reduce capacitive coupling between the inductively coupled plasma source and the plasma.

Abstract: Apparatus, systems, and methods for conducting a hardmask (e.g., carbon containing hardmask) removal process on a workpiece are provided. In one example implementation, a process can include admitting a process gas into a plasma chamber, generating a plasma in the plasma chamber from the process gas using an inductively coupled plasma source, and exposing the carbon containing hardmask to the plasma to remove at least a portion of the carbon containing hardmask. The process gas can include a sulfur containing gas. The process gas does not include a halogen containing gas. The inductively coupled plasma source can be separated from the plasma chamber by a grounded electrostatic shield to reduce capacitive coupling between the inductively coupled plasma source and the plasma.

Abstract: The present invention relates generally to pushbutton actuators. More particularly, the invention encompasses a pushbutton 2 position twist release switch with integral LED and actuator. The invention also includes a pushbutton 3 position momentary switch with an integral LED and actuator. Another embodiment of the invention relates to a pushbutton 3 position maintained switch with an integral LED and actuator. The invention also includes various embodiments of the inventive pushbutton actuator of this invention. The inventive pushbutton also comprises a pushbutton knob that has ridges for the transmission and scattering of light for the LED in the module.

Abstract: The present invention relates generally to pushbutton actuators. More particularly, the invention encompasses a pushbutton 2 position twist release switch with integral LED and actuator. The invention also includes a pushbutton 3 position momentary switch with an integral LED and actuator. Another embodiment of the invention relates to a pushbutton 3 position maintained switch with an integral LED and actuator. The invention also includes various embodiments of the inventive pushbutton actuator of this invention. The inventive pushbutton also comprises a pushbutton knob that has ridges for the transmission and scattering of light for the LED in the module.

Abstract: According to one embodiment of the invention, a method for fabricating a MIM capacitor in a semiconductor die includes a step of depositing a first interconnect metal layer. The method further includes depositing a layer of silicon nitride on the first interconnect layer. The layer of silicon nitride is deposited in a deposition process using an ammonia-to-silane ratio of at least 12.5. The method further includes depositing a layer of MIM capacitor metal on the layer of silicon nitride. The method further includes etching the layer of MIM capacitor metal to form an upper electrode of the MIM capacitor. According to this exemplary embodiment, the method further includes etching the layer of silicon nitride to form a MIM capacitor dielectric segment and etching the first interconnect metal layer to form a lower electrode of the MIM capacitor. The MIM capacitor has a capacitance density of at least 2.0 fF/um2.