Abstract: A fabrication method and associated integrated circuit (IC) structures and devices that include a metal-all-around contact structure coupled with an S/D region are described herein. In one example, an IC structure may include a region of a doped semiconductor material. An IC structure may include a stack of nanoribbons of a semiconductor material including first portions and second portions on either side of the region, wherein the first portions are in contact with a first side of the region and the second portions are in contact with a second side of the region. An IC structure may include a conductive material over portions of the region between the first side and the second side in a same layer as at least one of the nanoribbons of the stack.

Abstract: An IC device may have active regions and one or more isolation regions. The IC device includes gates that are in parallel. One or more semiconductor structures (e.g., fins, nanoribbons, etc.) may extend across each gate in the IC device. Some of the gates are in the active regions. The other gates are in the isolation region. A gate in an active region may be between semiconductor regions, which may function as the source region and drain region of a transistor. A gate in an isolation region may be between insulator regions. The insulator regions may be formed from the backside of the IC device. For instance, semiconductor regions may be formed in both the active regions and the isolation regions. The semiconductor regions in the regions designated to be isolation regions may be removed from the backside and filled with one or more electrical insulators.

Abstract: An IC device may have activation regions and an isolation region between the active regions. An active region may include one or more transistors. The IC device includes gates that are in parallel. Some of the gates are in the active regions. The other gates are in the isolation region. A source or drain region may be formed between a gate in the isolation region and a gate in a transistor in the first direction. The IC device may include one or more semiconductor structures that extend across a gate in a transistor, and the semiconductor structures may constitute a channel region of the transistor. The IC device may also include one or more semiconductor structures that extend across an individual gate in the isolation region. An insulative structure may be formed between two gates in the isolation region. The insulative structure may be over the source or drain region.

Abstract: An IC device may include a support structure and a transistor built based on the support structure. The transistor may include an electrical contact over a semiconductor region in the transistor. The electrical contact may be a single structure formed by filling a single opening region with a conductive material. In an example, an end of the electrical contact may contact the semiconductor region, and another end of the electrical contact may contact a deep via. The deep via may extend through the support structure and contact a backside metal layer for delivering power or signal to the semiconductor region. In another example, an end of the electrical contact may contact the semiconductor region, and another end of the electrical contact may contact a semiconductor region in another transistor. A dielectric structure may be between the two semiconductor regions.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices including asymmetric source and drain regions are described herein. In one example, an integrated circuit structure includes a transistor including a first region and a second region, where one of the first region and the second region is a source region of the transistor, and another of the first region and the second region is a drain region of the transistor, and where the first and second regions have different widths. In one example, the first region has a first width and the second region has a second width that is smaller than the first width.

Abstract: A fabrication method and associated integrated circuit (IC) structures and devices that include a conductive via with front-side and back-side connections with an S/D region are described herein. In one example, an IC structure includes a conductive via extending between a first layer and a second layer and an S/D region of a transistor between the first layer and the second layer, where the S/D region includes a first semiconductor material and a second semiconductor material. In one such example, the second semiconductor material may be epitaxially grown on the first semiconductor material of the S/D region from a back side of the IC structure. Conductive elements in layers over and under the conductive via may couple the conductive via with the S/D region from both the front-side and back-side S/D contact structures.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices involving back-side nanoribbon removal are described herein. In one example, back-side nanoribbon removal involves providing stacks of nanoribbons from a first side of an IC structure, followed by removing one or more of the nanoribbons from a second side that is opposite the first side. In one example, an IC structure fabricated with back-side nanoribbon removal techniques may include a first stack of nanoribbons over a support and a second stack of nanoribbons over the support, where the number of nanoribbons in the first stack is less than in the second stack. A first transistor includes first channel regions in the nanoribbons of the first stack and a second transistor includes second channel regions in the nanoribbons of the second stack. Therefore, in one such example, the first transistor has channel regions in fewer nanoribbons than the second transistor.

Abstract: Fabrication methods for integrated circuit (IC) structures and devices with different nanoribbon thicknesses are disclosed. In one example, an IC structure includes a stack of nanoribbons stacked above one another over the support, including a first nanoribbon with a first channel region and a second nanoribbon with a second channel region, where the first channel region has a first thickness and the second channel region has a second thickness, and where the first thickness of the first channel region is different (e.g., greater) than the second thickness of the second channel region.

Abstract: An IC device may include a semiconductor structure and a backside semiconductor structure over the semiconductor structure. The semiconductor structure and backside semiconductor structure may constitute the source or drain region of a transistor. The backside semiconductor structure may be closer to the backside of a substrate of the IC device than the semiconductor structure. The backside semiconductor structure may be formed at a lower temperature than the semiconductor structure. The backside semiconductor structure may have one or more different materials from the semiconductor structure. For instance, a semiconductor material in the backside semiconductor structure may have a different crystal direction from a semiconductor material in the semiconductor structure. As another example, the backside semiconductor structure may have one or more different chemical compounds from the semiconductor structure.

Abstract: An IC device with one or more transistors may also include one or more vias and jumpers for delivering power to the transistors. For instance, a via may be coupled to a power plane. A jumper may be connected to the via and an electrode of a transistor. With the via and jumper, an electrical connection is built between the power plane and the electrode. The via may be self-aligned. The IC device may include a dielectric structure at a first side of the via. A portion of the jumper may be at a second side of the via. The second side opposes the first side. The dielectric structure and the portion of the jumper may be over another dielectric structure that has a different dielectric material from the dielectric structure. The via may be insulated from another electrode of the transistor, which may be coupled to a ground plane.

Abstract: Integrated circuit structures having internal spacers for 2D channel materials, and methods of fabricating integrated circuit structures having internal spacers for 2D channel materials, are described. For example, an integrated circuit structure includes a stack of two-dimensional (2D) material nanowires. A gate structure is vertically around the stack of 2D material nanowires. Internal gate spacers are between vertically adjacent ones of the stack of 2D material nanowires and laterally adjacent to the gate structure. The 2D material nanowires are recessed relative to the internal gate spacers. Conductive contact structures are at corresponding ends of the stack of 2D material nanowires, the conductive contact structures adjacent to the internal gate spacers and vertically overlapping with the internal gate spacers.

Abstract: Integrated circuit structures having deep via bar width tuning are described. For example, an integrated circuit structure includes a plurality of gate lines extending over first and second semiconductor nanowire stack channel structures or fin structures. A plurality of trench contacts is intervening with the plurality of gate lines. A conductive structure is between the first and second semiconductor nanowire stack channel structures or fin structures, the conductive structure having a first width in a first region and a second width in a second region between the first and second semiconductor nanowire stack channel structures or fin structures, the second width different than the first width.

Abstract: Trench contact structures with etch stop layers, and methods of fabricating trench contact structures with etch-stop layers, are described. In an example, an integrated circuit structure includes a fin structure. An epitaxial source or drain structure is on the fin structure. An isolation structure is laterally adjacent to sides of the fin structure. A dielectric layer is on at least a portion of a top surface of the isolation structure and partially surrounds the epitaxial source or drain structure and leaves an exposed portion of the epitaxial source or drain structure. A conductive trench contact structure is on the exposed portion of the epitaxial source or drain structure. The conductive trench contact structure does not extend into the isolation structure.

Abstract: Multiple voltage threshold integrated circuit structures with local layout effect tuning, and methods of fabricating multiple voltage threshold integrated circuit structures with local layout effect tuning, are described. For example, an integrated circuit structure includes a first fin structure or vertical arrangement of horizontal nanowires. A second fin structure or vertical arrangement of horizontal nanowires is laterally spaced apart from the first fin structure or vertical arrangement of horizontal nanowires. An N-type gate structure is over the first fin structure or vertical arrangement of horizontal nanowires. A P-type gate structure is over the second fin structure or vertical arrangement of horizontal nanowires, the P-type gate structure in contact with the N-type gate structure with a PN boundary between the P-type gate structure and the N-type gate structure.

Abstract: Techniques are provided to form an integrated circuit having an airgap spacer between at least a transistor gate structure and an adjacent source or drain contact. In one such example, a FET (field effect transistor) includes a gate structure that extends around a fin or any number of nanowires (or nanoribbons or nanosheets, as the case may be) of semiconductor material. The semiconductor material may extend in a first direction between source and drain regions while the gate structure extends over the semiconductor material in a second direction. Airgaps are provided in the regions between the gate structures and the adjacent source/drain contacts. The airgaps have a low dielectric constant (e.g., around 1.0) to reduce the parasitic capacitance between the conductive structures.

Abstract: Techniques are provided herein to form an integrated circuit having dielectric material formed in cavities beneath source or drain regions. The cavities may be formed within subfin portions of semiconductor devices. In one such example, a FET (field effect transistor) includes a gate structure extending around a fin or any number of nanowires of semiconductor material. The semiconductor material may extend in a first direction between source and drain regions while the gate structure extends over the semiconductor material in a second direction substantially orthogonal to the first direction. A dielectric fill may be formed in a recess beneath the source or drain regions, or a dielectric liner may be formed on sidewalls of the recess, to prevent epitaxial growth of the source or drain regions from the subfins. Removal of the semiconductor subfin from the backside may then be performed without causing damage to the source or drain regions.

Abstract: Integrated circuit structures having reduced local layout effects, and methods of fabricating integrated circuit structures having reduced local layout effects, are described. For example, an integrated circuit structure includes an NMOS region including a first plurality of fin structures or vertical stacks of horizontal nanowires, and first alternating gate lines and trench contact structures over the first plurality of fin structures or vertical stacks of horizontal nanowires. The integrated circuit structure also includes a PMOS region including a second plurality of fin structures or vertical stacks of horizontal nanowires, and second alternating gate and trench contact structures over the second plurality of fin structures or vertical stacks of horizontal nanowires. A gate line is shared between the NMOS region and the PMOS region, and a trench contact structure is shared between the NMOS region and the PMOS region.

Abstract: Integrated circuit structures having patch spacers, and methods of fabricating integrated circuit structures having patch spacers, are described. For example, an integrated circuit structure includes a stack of horizontal nanowires. A gate structure is vertically around the stack of horizontal nanowires, the stack of horizontal nanowires extending laterally beyond the gate structure. An internal gate spacer is between vertically adjacent ones of the stack of horizontal nanowires and laterally adjacent to the gate structure. An external gate spacer is along sides of the gate structure and over the stack of horizontal nanowires, the external gate spacer having one or more patch spacers therein.

Abstract: Techniques to form semiconductor devices can include one or more via structures having substrate taps. A semiconductor device includes a gate structure around or otherwise on a semiconductor region (or channel region). The gate structure may extend over the semiconductor regions of any number of devices along a given direction. The gate structure may be interrupted, for example, between two transistors with a via structure that extends through an entire thickness of the gate structure and includes a conductive core. The via structure has a conductive foot portion beneath the gate structure and a conductive arm portion extending from the conductive foot portion along a height of the gate structure. The conductive foot portion has a greater width along the given direction than any part of the conductive arm portion. The via structure may further include one or more dielectric layers between the conductive arm portion and the gate structure.

Abstract: Techniques are provided to form semiconductor devices that include through-gate structures (e.g., gate cut structures or conductive via structures) that have an airgap spacer between the structure and the adjacent gate electrode. In an example, a semiconductor device includes a gate structure around or otherwise on a semiconductor region (or channel region) that extends from a first source or drain region to a second source or drain region. A through-gate structure may extend in a third direction through an entire thickness of the gate structure and adjacent to the semiconductor region along the second direction. The through-gate structure may be a dielectric structure (e.g., a gate cut) or a conductive structure (e.g., a via). In either case, an airgap spacer exists between the through-gate structure and the gate structure.