Abstract: A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid ports (7, 8, 9); a cavity (6) disposed between the first layer and the second layer; a plurality of actuators (3, 4, 5) respectively disposed corresponding to each fluid port, the plurality of actuators (3, 4, 5) controlling the opening and closing of the plurality of fluid ports (7, 8, 9). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.

Abstract: A microvalve device and a manufacturing method therefore are disclosed. The microvalve device includes a body, including a first layer (7) and at least a second layer (8) forming a chamber (8) with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports (4, 5, 6) in fluid communication with the chamber (9); and piezoelectric actuators (1, 2, 3) corresponding to predetermined fluid ports (4, 5, 6), wherein the piezoelectric actuators (1, 2, 3) are arranged in the chamber (9) and strain extending and retracting directions of the piezoelectric actuators are parallel to the first layer (7), wherein free ends of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting directions are used for shielding the fluid ports (4, 5, 6) so as to control opening/closing states of the fluid ports (4, 5, 6).

Abstract: A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid ports (7, 8, 9); a cavity (6) disposed between the first layer and the second layer; a plurality of actuators (3, 4, 5) respectively disposed corresponding to each fluid port, the plurality of actuators (3, 4, 5) controlling the opening and closing of the plurality of fluid ports (7, 8, 9). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.