Patents by Inventor Tining Su

Tining Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11494526
    Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: November 8, 2022
    Inventors: Tining Su, Yang Yun
  • Publication number: 20210012038
    Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
    Type: Application
    Filed: July 17, 2020
    Publication date: January 14, 2021
    Inventors: Tining Su, Yang Yun
  • Patent number: 10792700
    Abstract: Protective coatings with one or more additives dispersed therethrough are disclosed. A protective coating may comprise a poly(p-xylylene), or parylene. An additive may be configured to cause the protective coating to contrast (e.g., visibly, etc.) with features or components that are exposed beyond a periphery of the protective coating. Additives that provide other characteristics are also disclosed. In addition, methods for applying protective coatings according to this disclosure are disclosed, as are inspection methods.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: October 6, 2020
    Inventors: Bronwyn Cox, Sean Owen Clancy, Yang Yun, Tining Su, Liulei Cao
  • Patent number: 10743421
    Abstract: A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: August 11, 2020
    Inventors: Yang Yun, Tining Su
  • Patent number: 10719634
    Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: July 21, 2020
    Inventors: Tining Su, Yang Yun
  • Patent number: 10669627
    Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: June 2, 2020
    Assignee: HzO, Inc.
    Inventors: Yang Yun, Max Sorenson, Chien-Lan Hsueh, Tining Su, Jim Dempster, Alex Anderson, Layton Baker
  • Publication number: 20180237909
    Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.
    Type: Application
    Filed: August 30, 2017
    Publication date: August 23, 2018
    Inventors: Yang Yun, Max Sorensen, Chien-Lan Hsueh, Tining Su, Jim Dempster, Alex Anderson, Layton Baker
  • Publication number: 20170362703
    Abstract: A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.
    Type: Application
    Filed: June 19, 2017
    Publication date: December 21, 2017
    Applicant: HZO, Inc.
    Inventors: Yang Yun, Tining Su
  • Patent number: 9848495
    Abstract: Protective coatings are disclosed that are configured to cover electronic components within an electronic device, while enabling electrical connections to be established with electrical contacts that are covered by the protective coatings. Such a protective coating may comprise a parylene, or a poly(p-xylylene), protective coating that has a thickness of at least 0.1 ?m and at most about 2 ?m. Electronic devices that include such a protective coating are also disclosed.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: December 19, 2017
    Assignee: HZO, Inc.
    Inventors: Liulei Cao, Tining Su, Yang Yun
  • Publication number: 20160328494
    Abstract: A method for optimizing a cracking efficiency with which a pyrolysis tube of a deposition apparatus cracks a precursor material into reactive species is disclosed, including measuring an input pressure at an entrance to the pyrolysis tube, outside of the pyrolysis tube; measuring an output pressure at an exit from the pyrolysis tube, outside of the pyrolysis tube; measuring a pyrolysis temperature within the pyrolysis tube; calculating a cracking efficiency based on the input pressure, the output pressure and the pyrolysis temperature; and determining an adjustment to be made to at least one of the input pressure, the output pressure and the pyrolysis temperature to increase the cracking efficiency.
    Type: Application
    Filed: May 5, 2016
    Publication date: November 10, 2016
    Inventors: Tining Su, Yang Yun
  • Publication number: 20160052015
    Abstract: Protective coatings with one or more additives dispersed therethrough are disclosed. A protective coating may comprise a poly(p-xylylene), or parylene. An additive may be configured to cause the protective coating to contrast (e.g., visibly, etc.) with features or components that are exposed beyond a periphery of the protective coating. Additives that provide other characteristics are also disclosed. In addition, methods for applying protective coatings according to this disclosure are disclosed, as are inspection methods.
    Type: Application
    Filed: August 24, 2015
    Publication date: February 25, 2016
    Inventors: Bronwyn Cox, Sean Owen Clancy, Yang Yun, Tining Su, Liulei Cao
  • Publication number: 20150361551
    Abstract: A protective coating for an electronic device, such as a coating that is substantially impermeable to moisture and oxygen, comprises an ultra-thin film comprising a plurality of sub-layers formed by atomic layer deposition (ALD) processes. Low temperature ALD processes may be used to form the sub-layers of the protective coating. The density of the protective film may be enhanced with energy, to which the protective coating or sub-layers thereof may be exposed during deposition or intermittently during the deposition process. ALD apparatuses that are equipped to perform the disclosed processes are also disclosed, as are electronic devices that include the disclosed protective coatings.
    Type: Application
    Filed: June 15, 2015
    Publication date: December 17, 2015
    Inventors: Tining Su, Sean Owen Clancy, Chien-Lan Hsueh, Yang Yun, Liulei Cao
  • Publication number: 20150366097
    Abstract: Protective coatings are disclosed that are configured to cover electronic components within an electronic device, while enabling electrical connections to be established with electrical contacts that are covered by the protective coatings. Such a protective coating may comprise a parylene, or a poly(p-xylylene), protective coating that has a thickness of at least 0.1 ?m and at most about 2 ?m. Electronic devices that include such a protective coating are also disclosed.
    Type: Application
    Filed: June 15, 2015
    Publication date: December 17, 2015
    Inventors: Liulei Cao, Tining Su, Yang Yun