Abstract: In a known measuring process, the stability for the generation of two measuring beams, by means of two measuring systems operating in the same measurement strategy is given. The reflection angle of the measuring beams deflected onto a blank are detected as inclination deviations of the surface and analyzed by difference. Systematic measuring deviations are conventionally reduced however mainly by the use of a single measuring strategy or system with a moving measuring beam. According to the invention, the measurement accuracy can be improved by combining two measuring strategies in the measuring process, carried out by different measuring systems (13, 14), which can be an autocollimator (AKF) and a long-trace profilometer)LTP), the measuring beams of which can be directed at the blank (10) using different types of deflecting units (15). Measured results with an accuracy of up to 0.01 angle seconds, hence sub-nanometer range, for example +/?0.

Abstract: Known component suspensions either use six parallel double-jointed members (hexapods) that while being adjustable with six degrees of freedom and high accuracy can only be adjusted in mutual dependency of one another, or double-jointed members that are mounted in series via connecting bodies and whose joints can be rotated about one axis, that allow only two rotational deflections, under error summation, and that meet in a virtual point as the point of origin of a Cartesian coordinate system. The aim of the invention is to design a suspension that allows a movement of the component in all six degrees of freedom in a highly accurate, reproducible manner while maintaining the axial rigidity of the component.