Abstract: Described herein are photomask blanks and photomasks prepared therefrom, methods for producing the photomask blanks and apparatus used in such methods. In one aspect, there is described methods for preparing photomask blanks having layers with a compositional gradient, i.e., a varying composition through the thickness of the layer. In other aspects, either in conjunction with the above aspects or independently, methods and apparatus are provided which allow more efficient use of a cluster tool for preparing the photomask blanks and performing quality control on them. The inventions find applicability, for example, in preparing binary photomask blanks and phase shift photomask blanks.

Abstract: The present invention is an improved release coating for use on a variety of elastomeric structures, such as printer rollers and belts. The coating of the present invention is a thin expanded polytetrafluoroethylene skin that has a porous surface attached to a substratum and an impermeable surface exposed as the contact surface. This use of dual surfaces on a single thin coating provides both an excellent bond to substratum materials, such as a silicone elastomer layer, as well as being highly wear resistant and resistant to chemical attack.

Abstract: This invention provides a liquid metering and surface coating device which can satisfactorily perform the operation of applying a release liquid to at least the surface of toner image fixation rolls in plain paper copying, with exceptional accuracy, uniformity, and durability. The device comprises a porous support layer adhered to a metal shaft. The porous support layer is comprised of an open-celled thermosetting polymer foam internally reinforced to obtain the strength, resilience, and heat resistance needed for high durability in use as part of a hot toner image fixation mechanism in a PPC machine. The porous support is comprised of materials having high compatibility with and wettability by the liquids to be distributed and having high liquid holding capacity so as to provide smooth continuous liquid delivery.

Abstract: The present invention is an improved release coating for use on a variety of surfaces, such as printer rollers and belts. The coating of the present invention is an thin expanded polytetrafluoroethylene skin that has a porous surface attached to a substratum and an impermeable surface exposed as the contact surface. This use of dual surfaces on a single thin coating provides both an excellent bond to substratum materials, such as a silicone elastomer layer, as well as being highly wear resistant and resistant to chemical attack.

Abstract: A process is disclosed for separating a series of substrate elements laminated with a supported photosensitive composition whereby the support is weakened by heating in a line pattern along abutting edges of the substrate prior to pulling the laminated substrates apart.