Patents by Inventor Tito H. Santiago

Tito H. Santiago has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for removing dissolved gas from a liquid
    Patent number: 5772736
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: February 28, 1997
    Date of Patent: June 30, 1998
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind
  • Device for removing dissolved gas from a liquid
    Patent number: 5645625
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: February 23, 1995
    Date of Patent: July 8, 1997
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind
  • Device for removing dissolved gas from a liquid
    Patent number: 5425803
    Abstract: An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
    Type: Grant
    Filed: July 5, 1994
    Date of Patent: June 20, 1995
    Assignee: Novellus Systems, Inc.
    Inventors: Bart J. van Schravendijk, Christopher W. Burkhart, Tito H. Santiago, Charles E. Pomeroy, Jeffrey W. Lind