Abstract: An integrated flow sensor for determining a fluid flow is described.

Abstract: An integrated flow sensor for determining a fluid flow is described.

Abstract: An integrated microvalve has a substrate, a first function layer applied to the substrate, and a second function layer applied to the first function layer, the first function layer being designed as a diaphragm in at least one valve area, the second function layer being removed in the valve area and in a fluid discharge area, and an anvil connected essentially only to the diaphragm being exposed from the substrate in the valve area, a plate being applied to the second function area to form a valve space.

Abstract: In a method and apparatus of an amperometric probe for characterization of the electrostatic state in gases containing ions, by means of the electrical space potential and/or the density of positive and negative ions, in particular in gases flowing around a sensor (1) with an applied electrical potential (5, 6), and emitting ions to the sensor; an electrical circuit (2) is provided for detecting the measured sensor curents; a current comparison unit (3) follows the current detection and monitors that the sensor currents are within the permissible value range in terms of their mathematical sign and their magnitude, applies a first sensor potential and detects the associated sensor current, as well as subsequently applies a second sensor potential and carries out an adaptation process in such a way that the detected second sensor current has the same mathematical sign as the first sensor current; the space potential and the density of the ions of one polarity are determined in a calculation unit (4); and, with