Patents by Inventor Tkashi SHIGETA

Tkashi SHIGETA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENING/CLOSING SYSTEM
    Publication number: 20200168495
    Abstract: Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system.
    Type: Application
    Filed: January 28, 2020
    Publication date: May 28, 2020
    Applicant: SINFONIA TECHNOLOGY CO., LTD.
    Inventors: Toshihiro KAWAI, Yasushi TANIYAMA, Munekazu KOMIYA, Tkashi SHIGETA