Patents by Inventor Tobias BARCHEWITZ

Tobias BARCHEWITZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor structure with substantially straight contact profile
    Patent number: 11127683
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor structure with a substantially straight contact profile and methods of manufacture. The structure includes a block material comprising an upper oxidized layer at an interface with an insulating material; and an interconnect contact structure with a substantially straight profile through the oxidized layer of the block material.
    Type: Grant
    Filed: April 4, 2019
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Ronald Naumann, Matthias Zinke, Robert Seidel, Tobias Barchewitz
  • SEMICONDUCTOR STRUCTURE WITH SUBSTANTIALLY STRAIGHT CONTACT PROFILE
    Publication number: 20190229063
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor structure with a substantially straight contact profile and methods of manufacture. The structure includes a block material comprising an upper oxidized layer at an interface with an insulating material; and an interconnect contact structure with a substantially straight profile through the oxidized layer of the block material.
    Type: Application
    Filed: April 4, 2019
    Publication date: July 25, 2019
    Inventors: Ronald NAUMANN, Matthias ZINKE, Robert SEIDEL, Tobias BARCHEWITZ