Abstract: The present disclosure relates to a vibration damper with adjustable damping force, comprising an inner cylinder with at least one working chamber which exhibits a flow connection to a damping-valve device, wherein the damper-valve device is arranged outside of an outer cylinder, wherein the flow connection has been realized in a component that is separate from the inner cylinder, wherein the separate component is constituted by a pressure-stage adapter which constitutes a part of the working chamber and which exhibits a coupling to the damping-valve device, wherein a base piece is arranged at the end of the inner cylinder, wherein the pressure-stage adapter and the base piece have been combined to form a pressure-stage adapter device.

Abstract: A computer system is provided which includes a plurality of nodes, which include chips of different types. In each node, one of the chips is configured as a master chip, which is connected to one or more slave chips via two or more multi-drop nets (e.g., checkstop, clockrun). The master chip and the slave chips are connected to a reference clock, and event triggering information is transmitted via the multi-drop nets (checkstop, clockrun) to the slave chips. Event trigger commands are submitted by the master chip when it receives a request, and internal offset counters are used to adjust both the receiving cycle and the cycle when the command is propagated to the units on the chips. In operation, the offset counters are synchronized by a reference clock.

Abstract: A generally planar substrate pallet having an front, a back, and pair of sides. The distance between the front and the back and the distance between the sides are significantly longer than the thickness of the substrate pallet. The ratio of vertical deflection of the substrate pallet to the distance between the sides at temperatures used in high temperature processing systems relative to room temperature is less than 1%.

Abstract: Pallets suited to accommodate thermal gradients during processing. In one aspect, a pallet includes a pair of elongate members, a fixed elongate lateral cross member fixedly coupled to each of the elongate members, and an elongate floating lateral cross member floatingly coupled to the elongate members. The floating lateral cross member displaced from the fixedly coupled lateral cross member to define a gap therebetween.

Abstract: A computer system is provided which includes a plurality of nodes, which include chips of different types. In each node, one of the chips is configured as a master chip, which is connected to one or more slave chips via two or more multi-drop nets (e.g., checkstop, clockrun). The master chip and the slave chips are connected to a reference clock, and event triggering information is transmitted via the multi-drop nets (checkstop, clockrun) to the slave chips. Event trigger commands are submitted by the master chip when it receives a request, and internal offset counters are used to adjust both the receiving cycle and the cycle when the command is propagated to the units on the chips. In operation, the offset counters are synchronized by a reference clock.

Abstract: A substrate transport system adapted for transporting a substrate moving in a substrate transport direction in a processing chamber is provided. The substrate transport system includes a plurality of transport rollers each having a transport shaft and a transport wheel. The transport shaft and the transport wheel are adapted for supporting the moving substrate. A heating means is arranged between the position of the moving substrate and the transport shaft and is adapted for heating the moving substrate.