Patents by Inventor Tobias Franz

Tobias Franz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047207
    Abstract: A method of forming a semiconductor device includes providing a base substrate comprising SiC and a growth surface extending along a plane that is angled relative to a first crystallographic plane of the SiC from the base substrate, forming first and second trenches in the base substrate that extend from the growth surface into the base substrate, epitaxially forming a first SiC layer on the growth surface of the base substrate by a step-controlled epitaxy technique, and epitaxially forming a second SiC layer on the first SiC layer, wherein the first SiC layer is a layer of ?-SiC, and wherein the second SiC layer is a layer of ?-SiC.
    Type: Application
    Filed: August 2, 2022
    Publication date: February 8, 2024
    Inventors: Christian Zmoelnig, Tobias Franz Wolfgang Hoechbauer, Andreas Voerckel, Hans Weber
  • Patent number: 11881397
    Abstract: A semiconductor substrate includes a base portion, an auxiliary layer and a surface layer. The auxiliary layer is formed on the base portion. The surface layer is formed on the auxiliary layer. The surface layer is in contact with a first main surface of the semiconductor substrate. The auxiliary layer has a different electrochemical dissolution efficiency than the base portion and the surface layer. At least a portion of the auxiliary layer and at least a portion of the surface layer are converted into a porous structure. Subsequently, an epitaxial layer is formed on the first main surface.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: January 23, 2024
    Assignee: Infineon Technologies AG
    Inventors: Iris Moder, Bernhard Goller, Tobias Franz Wolfgang Hoechbauer, Roland Rupp, Francisco Javier Santos Rodriguez, Hans-Joachim Schulze
  • Patent number: 11748094
    Abstract: The disclosure provides an approach for a non-disruptive system upgrade. Embodiments include installing an upgraded version of an operating system (OS) on a computing system while a current version of the OS continues to run. Embodiments include entering a maintenance mode on the computing system, including preventing the addition of new applications and modifying the handling of storage operations on the computing system for the duration of the maintenance mode. Embodiments include, during the maintenance mode, configuring the upgraded version of the OS. Embodiments include, after configuring the upgraded version of the OS, suspending a subset of applications running on the computing system, transferring control over resources of the computing system to the upgraded version of the OS, and resuming the subset of the applications running on the computing system. Embodiments include exiting the maintenance mode on the computing system.
    Type: Grant
    Filed: January 5, 2023
    Date of Patent: September 5, 2023
    Assignee: VMWARE, INC.
    Inventors: Tobias Franz Rolf Stumpf, Ashish Kaila, Adrian Drzewiecki, Vishnu Mohan Sekhar, Stanley Zhang
  • Publication number: 20230153106
    Abstract: The disclosure provides an approach for a non-disruptive system upgrade. Embodiments include installing an upgraded version of an operating system (OS) on a computing system while a current version of the OS continues to run. Embodiments include entering a maintenance mode on the computing system, including preventing the addition of new applications and modifying the handling of storage operations on the computing system for the duration of the maintenance mode. Embodiments include, during the maintenance mode, configuring the upgraded version of the OS. Embodiments include, after configuring the upgraded version of the OS, suspending a subset of applications running on the computing system, transferring control over resources of the computing system to the upgraded version of the OS, and resuming the subset of the applications running on the computing system. Embodiments include exiting the maintenance mode on the computing system.
    Type: Application
    Filed: January 5, 2023
    Publication date: May 18, 2023
    Inventors: Tobias Franz Rolf STUMPF, Ashish KAILA, Adrian DRZEWIECKI, Vishnu Mohan SEKHAR, Stanley ZHANG
  • Publication number: 20230051830
    Abstract: A transistor device and a method for forming a transistor device are disclosed. The transistor device includes: a SiC semiconductor body that includes a first semiconductor layer and a second semiconductor layer formed on top of the first semiconductor; a trench structure extending from a first surface of the semiconductor body through the second semiconductor layer into the first semiconductor layer; a drain region arranged in the first semiconductor layer; and a plurality of transistor cells each coupled between the drain region and a source node. The trench structure subdivides the second semiconductor layer into a plurality of mesa regions and includes at least one cavity. At least one of the plurality of transistor cells is at least partially integrated in each of the mesa regions.
    Type: Application
    Filed: August 12, 2022
    Publication date: February 16, 2023
    Inventors: Andreas Voerckel, Hans Weber, Tobias Franz Wolfgang Hoechbauer
  • Patent number: 11576259
    Abstract: A carrier configured to be attached to a semiconductor substrate via a first surface comprises a continuous carbon structure defining a first surface of the carrier, and a reinforcing material constituting at least 2 vol-% of the carrier.
    Type: Grant
    Filed: August 23, 2019
    Date of Patent: February 7, 2023
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Andre Brockmeier, Tobias Franz Wolfgang Hoechbauer, Gerhard Metzger-Brueckl, Matteo Piccin, Francisco Javier Santos Rodriguez
  • Patent number: 11567754
    Abstract: The disclosure provides an approach for a non-disruptive system upgrade. Embodiments include installing an upgraded version of an operating system (OS) on a computing system while a current version of the OS continues to run. Embodiments include entering a maintenance mode on the computing system, including preventing the addition of new applications and modifying the handling of storage operations on the computing system for the duration of the maintenance mode. Embodiments include, during the maintenance mode, configuring the upgraded version of the OS. Embodiments include, after configuring the upgraded version of the OS, suspending a subset of applications running on the computing system, transferring control over resources of the computing system to the upgraded version of the OS, and resuming the subset of the applications running on the computing system. Embodiments include exiting the maintenance mode on the computing system.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: January 31, 2023
    Assignee: VMWARE, INC.
    Inventors: Tobias Franz Rolf Stumpf, Ashish Kaila, Adrian Drzewiecki, Vishnu Mohan Sekhar, Stanley Zhang
  • Patent number: 11557506
    Abstract: Methods for processing a semiconductor substrate are proposed. An example of a method includes forming cavities in the semiconductor substrate by implanting ions through a first surface of the semiconductor substrate. The cavities define a separation layer in the semiconductor substrate. A semiconductor layer is formed on the first surface of the semiconductor substrate. Semiconductor device elements are formed in the semiconductor layer. The semiconductor substrate is separated along the separation layer into a first substrate part including the semiconductor layer and a second substrate part.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: January 17, 2023
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Werner Schustereder, Alexander Breymesser, Mihai Draghici, Tobias Franz Wolfgang Hoechbauer, Wolfgang Lehnert, Hans-Joachim Schulze, Marko David Swoboda
  • Publication number: 20220359194
    Abstract: A semiconductor substrate includes a base portion, an auxiliary layer and a surface layer. The auxiliary layer is formed on the base portion. The surface layer is formed on the auxiliary layer. The surface layer is in contact with a first main surface of the semiconductor substrate. The auxiliary layer has a different electrochemical dissolution efficiency than the base portion and the surface layer. At least a portion of the auxiliary layer and at least a portion of the surface layer are converted into a porous structure. Subsequently, an epitaxial layer is formed on the first main surface.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Iris MODER, Bernhard GOLLER, Tobias Franz Wolfgang HOECHBAUER, Roland RUPP, Francisco Javier SANTOS RODRIGUEZ, Hans-Joachim SCHULZE
  • Patent number: 11476111
    Abstract: A semiconductor substrate includes a base portion, an auxiliary layer and a surface layer. The auxiliary layer is formed on the base portion. The surface layer is formed on the auxiliary layer. The surface layer is in contact with a first main surface of the semiconductor substrate. The auxiliary layer has a different electrochemical dissolution efficiency than the base portion and the surface layer. At least a portion of the auxiliary layer and at least a portion of the surface layer are converted into a porous structure. Subsequently, an epitaxial layer is formed on the first main surface.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: October 18, 2022
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Iris Moder, Bernhard Goller, Tobias Franz Wolfgang Hoechbauer, Roland Rupp, Francisco Javier Santos Rodriguez, Hans-Joachim Schulze
  • Publication number: 20220276858
    Abstract: The disclosure provides an approach for a non-disruptive system upgrade. Embodiments include installing an upgraded version of an operating system (OS) on a computing system while a current version of the OS continues to run. Embodiments include entering a maintenance mode on the computing system, including preventing the addition of new applications and modifying the handling of storage operations on the computing system for the duration of the maintenance mode. Embodiments include, during the maintenance mode, configuring the upgraded version of the OS. Embodiments include, after configuring the upgraded version of the OS, suspending a subset of applications running on the computing system, transferring control over resources of the computing system to the upgraded version of the OS, and resuming the subset of the applications running on the computing system. Embodiments include exiting the maintenance mode on the computing system.
    Type: Application
    Filed: June 2, 2021
    Publication date: September 1, 2022
    Inventors: TOBIAS FRANZ ROLF STUMPF, Ashish Kaila, Adrian Drzewiecki, Vishnu Mohan Sekhar, Stanley Zhang
  • Patent number: 11373863
    Abstract: A wafer composite includes a handle substrate, an auxiliary layer formed on a first main surface of the handle substrate, and a silicon carbide structure formed over the auxiliary layer. The handle substrate is subjected to laser radiation that modifies crystalline material along a focal plane in the handle substrate. The focal plane is parallel to the first main surface. The auxiliary layer is configured to stop propagation of microcracks that the laser radiation may generate in the handle substrate.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: June 28, 2022
    Assignee: Infineon Technologies AG
    Inventors: Roland Rupp, Mihai Draghici, Tobias Franz Wolfgang Hoechbauer, Wolfgang Lehnert, Matteo Piccin
  • Patent number: 11107732
    Abstract: A method for processing a wide band gap semiconductor wafer is proposed. The method includes depositing a non-monocrystalline support layer at a back side of a wide band gap semiconductor wafer, depositing an epitaxial layer at a front side of the wide band gap semiconductor wafer, and splitting the wide band gap semiconductor wafer along a splitting region to obtain a device wafer including at least a part of the epitaxial layer, and a remaining wafer including the non-monocrystalline support layer.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: August 31, 2021
    Assignee: Infineon Technologies AG
    Inventors: Francisco Javier Santos Rodriguez, Guenter Denifl, Tobias Franz Wolfgang Hoechbauer, Martin Huber, Wolfgang Lehnert, Roland Rupp, Hans-Joachim Schulze
  • Publication number: 20210159115
    Abstract: Methods for processing a semiconductor substrate are proposed. An example of a method includes forming cavities in the semiconductor substrate by implanting ions through a first surface of the semiconductor substrate. The cavities define a separation layer in the semiconductor substrate. A semiconductor layer is formed on the first surface of the semiconductor substrate. Semiconductor device elements are formed in the semiconductor layer. The semiconductor substrate is separated along the separation layer into a first substrate part including the semiconductor layer and a second substrate part.
    Type: Application
    Filed: November 25, 2020
    Publication date: May 27, 2021
    Inventors: Werner SCHUSTEREDER, Alexander BREYMESSER, Mihai DRAGHICI, Tobias Franz Wolfgang HOECHBAUER, Wolfgang LEHNERT, Hans-Joachim SCHULZE, Marko David SWOBODA
  • Patent number: 10903078
    Abstract: A method for processing a silicon carbide wafer includes implanting ions into the silicon carbide wafer to form an absorption layer in the silicon carbide wafer. The absorption coefficient of the absorption layer is at least 100 times the absorption coefficient of silicon carbide material of the silicon carbide wafer outside the absorption layer, for light of a target wavelength. The silicon carbide wafer is split along the absorption layer at least by irradiating the silicon carbide wafer with light of the target wavelength to obtain a silicon carbide device wafer and a remaining silicon carbide wafer.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: January 26, 2021
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Alexander Breymesser, Guenter Denifl, Mihai Draghici, Bernhard Goller, Tobias Franz Wolfgang Hoechbauer, Wolfgang Lehnert, Roland Rupp, Werner Schustereder
  • Publication number: 20200357637
    Abstract: A wafer composite includes a handle substrate, an auxiliary layer formed on a first main surface of the handle substrate, and a silicon carbide structure formed over the auxiliary layer. The handle substrate is subjected to laser radiation that modifies crystalline material along a focal plane in the handle substrate. The focal plane is parallel to the first main surface. The auxiliary layer is configured to stop propagation of microcracks that the laser radiation may generate in the handle substrate.
    Type: Application
    Filed: May 7, 2020
    Publication date: November 12, 2020
    Inventors: Roland Rupp, Mihai Draghici, Tobias Franz Wolfgang Hoechbauer, Wolfgang Lehnert, Matteo Piccin
  • Patent number: 10775355
    Abstract: A clinical diagnostic system is presented and comprises a sample preparation station for automatically preparing samples comprising analytes of interest, a liquid chromatography (LC) separation station comprising a plurality of LC channels and a sample preparation/LC interface for inputting prepared samples into the LC channels. The system further comprises a controller to assign samples to pre-defined sample preparation workflows each comprising a pre-defined sequence of sample preparation steps and requiring a pre-defined time for completion depending on the analytes. The controller further assigns an LC channel for each prepared sample depending on the analytes and plans an LC channel input sequence for inputting the prepared samples that allows analytes from different LC channels to elute in a non-overlapping LC eluate output sequence based on expected elution times.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: September 15, 2020
    Assignee: Roche Diagnostics Operations, Inc.
    Inventors: Tobias Franz, Uwe Kobold, Peter Kupser, Roland Thiele
  • Publication number: 20200286730
    Abstract: A semiconductor substrate includes a base portion, an auxiliary layer and a surface layer. The auxiliary layer is formed on the base portion. The surface layer is formed on the auxiliary layer. The surface layer is in contact with a first main surface of the semiconductor substrate. The auxiliary layer has a different electrochemical dissolution efficiency than the base portion and the surface layer. At least a portion of the auxiliary layer and at least a portion of the surface layer are converted into a porous structure. Subsequently, an epitaxial layer is formed on the first main surface.
    Type: Application
    Filed: March 6, 2020
    Publication date: September 10, 2020
    Inventors: Iris MODER, Bernhard GOLLER, Tobias Franz Wolfgang HOECHBAUER, Roland RUPP, Francisco Javier SANTOS RODRIGUEZ, Hans-Joachim SCHULZE
  • Publication number: 20200068709
    Abstract: A carrier configured to be attached to a semiconductor substrate via a first surface comprises a continuous carbon structure defining a first surface of the carrier, and a reinforcing material constituting at least 2 vol-% of the carrier.
    Type: Application
    Filed: August 23, 2019
    Publication date: February 27, 2020
    Inventors: Hans-Joachim SCHULZE, Andre BROCKMEIER, Tobias Franz Wolfgang HOECHBAUER, Gerhard METZGER-BRUECKL, Matteo PICCIN, Francisco Javier SANTOS RODRIGUEZ
  • Publication number: 20190366858
    Abstract: An induction charging device for a partially or fully electrically operated motor vehicle may include a flat temperature control arrangement, a flat charging arrangement, and a heater. The temperature control arrangement may include at least one channel through which a cooling fluid is flowable. The charging arrangement may include at least one charging coil inductively couplable to an external primary coil during a charging process such that a battery of a vehicle is chargeable. The charging arrangement may be coupled to the temperature control arrangement to transfer heat such that a waste heat of the at least one charging coil during the charging process is transferable to the cooling fluid. The heater may be coupled to the temperature control arrangement to transfer heat such that a waste heat of the heater is transferable to the cooling fluid during the charging process and outside of the charging process.
    Type: Application
    Filed: May 29, 2019
    Publication date: December 5, 2019
    Inventors: Tobias Franz, Christopher Laemmle, Timo Laemmle