Patents by Inventor Tobias Joachim Menold

Tobias Joachim Menold has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250135583
    Abstract: Methods of sealing a venthole of a micromechanical device. The venthole leads to a chamber that contains a device. A first laser pulse is applied to the venthole of a substrate of the micromechanical device for a first time period. The first laser pulse has a first laser intensity spatial distribution. Thereafter, a second laser pulse is applied to the venthole for a second time period. The second laser pulse has a second laser intensity spatial distribution that is different than the first laser intensity spatial distribution. The second laser pulse can be applied for a time that is different than that of the first laser pulse.
    Type: Application
    Filed: October 28, 2023
    Publication date: May 1, 2025
    Inventors: Bo CHENG, Holger RUMPF, Jens FREY, Stephanie KARG, Tobias Joachim MENOLD, David BORBELY
  • Publication number: 20240228267
    Abstract: A venthole of a micromechanical device is sealed with laser irradiation. A micromechanical device has a substrate, such as silicon. The substrate has an upper surface, and defines a venthole leading to a chamber that contains a device, and a trench extending downward from the upper surface and located offset from the venthole. A laser pulse is applied to the substrate at or within the trench. This causes a portion of the substrate located below the upper surface to melt and travel laterally to close off and seal the venthole laterally from beneath the upper surface.
    Type: Application
    Filed: October 25, 2022
    Publication date: July 11, 2024
    Inventors: Bo CHENG, Holger RUMPF, Jens FREY, Charles TUFFILE, Stephanie KARG, Tobias Joachim MENOLD
  • Publication number: 20240132342
    Abstract: A venthole of a micromechanical device is sealed with laser irradiation. A micromechanical device has a substrate, such as silicon. The substrate has an upper surface, and defines a venthole leading to a chamber that contains a device, and a trench extending downward from the upper surface and located offset from the venthole. A laser pulse is applied to the substrate at or within the trench. This causes a portion of the substrate located below the upper surface to melt and travel laterally to close off and seal the venthole laterally from beneath the upper surface.
    Type: Application
    Filed: October 24, 2022
    Publication date: April 25, 2024
    Inventors: Bo CHENG, Holger RUMPF, Jens FREY, Charles TUFFILE, Stephanie KARG, Tobias Joachim MENOLD
  • Patent number: 11851324
    Abstract: A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.
    Type: Grant
    Filed: December 13, 2019
    Date of Patent: December 26, 2023
    Assignee: ROBERT BOSCH GMBH
    Inventors: Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold, Mawuli Ametowobla
  • Publication number: 20230176369
    Abstract: An optical phase array. The optical phase array includes a sending and/or receiving surface with a regular arrangement of waveguiding antennas. Electromagnetic radiation is decoupleable from the antennas and/or coupleable into the antennas. At least one antenna includes at least partially amorphous silicon.
    Type: Application
    Filed: November 30, 2022
    Publication date: June 8, 2023
    Inventors: Alexander Huebel, Julia Amthor, Marc Schmid, Tobias Joachim Menold
  • Publication number: 20220002147
    Abstract: A method for sealing entries in a MEMS element. The method includes: providing a functional layer having a functional region; producing a cavity underneath the functional region of the functional layer with the aid of a first entry outside of the functional region of the functional layer; sealing the first entry; producing a second entry to the cavity outside of the functional region of the functional layer; melting sealing material in the region of the second entry; and cooling off the melted sealing material to seal the second entry.
    Type: Application
    Filed: December 13, 2019
    Publication date: January 6, 2022
    Applicant: Robert Bosch GmbH
    Inventors: Christoph Hermes, Hans Artmann, Heribert Weber, Peter Schmollngruber, Thomas Friedrich, Tobias Joachim Menold, Mawuli Ametowobla