Abstract: An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

Abstract: An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

Abstract: The invention relates to an electromagnetic actuator having a magnetic circuit comprising at least two, preferably three, magnetic circuit elements, wherein the magnetic circuit elements exert an attracting or repelling force on one another such that the actuator effects a movement, wherein the position of at least one of the magnetic circuit elements relative to another magnetic circuit element can be adjusted in order to influence the actuator rigidity.

Abstract: A disclosed reluctance actuator includes a magnetizable stator, at least one coil, and a yoke. The coil is configured to generate a magnetic field in the stator and the yoke is configured to partially close the magnetic flux of the stator. The yoke is further configured as a movable element that performs lifting/tilting movements. An actuator system including a non-magnetic housing and a reluctance actuator is also disclosed. In the actuator system, the reluctance actuator may be at least partially located in the non-magnetic housing. A method of performing lifting/tilting movements of the yoke of a reluctance actuator is also disclosed. The method includes controlling a current in the at least one coil of the reluctance actuator to thereby generate a magnetic field in the stator. The magnetic field generates a lifting/tilting movement of the yoke due to interaction between the magnetic field and the yoke.

Abstract: 1. A device for the contactless distance and/or position determination of a measurement object (1), with an electrically conductive measurement object (1) and with a sensor (3) operating in particular according to the inductive, capacitive or the eddy current principle, wherein the sensor (3) comprises a measurement device (4), characterized in that the measurement device (4) is formed by at least two measurement elements (5, 5?, 5?) which are spatially separated from each other. Moreover, a corresponding sensor (3) is indicated.

Abstract: With regard to reliable measurements in the high temperature range with constructionally simple means, the invention relates to a displacement sensor operating without contact having a sensor element (1) suitable for high temperatures and electronics comprising drive and/or evaluation electronics that are coupled electrically to the sensor element (1), which displacement sensor is characterized in that the electronics are designed for a temperature range above 125° C. and are connected directly to the sensor element (1) or integrated in the sensor element (1).

Abstract: The invention relates to a reluctance actuator including a magnetizable stator, at least one coil, which is configured for generating a magnetic field in the stator, and a yoke for partially closing the magnetic flux of the stator, wherein the yoke is configured as a movable element for lifting/tilting movements.

Abstract: 1. A device for the contactless distance and/or position determination of a measurement object (1), with an electrically conductive measurement object (1) and with a sensor (3) operating in particular according to the inductive, capacitive or the eddy current principle, wherein the sensor (3) comprises a measurement device (4), characterized in that the measurement device (4) is formed by at least two measurement elements (5, 5?, 5?) which are spatially separated from each other. Moreover, a corresponding sensor (3) is indicated.

Abstract: Sensor with a one-layer or multi-layer sensor element operating in a contact-free manner and a housing 14 comprising an electric/electronic connection and, in given cases, electronic components, where the sensor element comprises a coil arrangement 1 whose windings 3 have a defined line width 5, line thickness 6, and line spacing 7 per layer 2 and whose layers 2 have a defined layer thickness 8b and, in given cases, a defined layer spacing 8a, characterized in that the sensor element is built up from ceramic layers in the sense of multi-layer ceramics and that with respect to traditional coil arrangements the layer thickness 8b or the layer spacing 8a is reduced and the number of windings per cross-sectional surface area is increased.

Abstract: The invention relates to a sensor, comprising a sensor element (1) that operates without contact, an electronic component (5), and a housing (2) having an electrical/electronic connection. The sensor element (1) is part of the housing (2) and is used to close and seal the housing (2) with respect to the measurement side (3).

Abstract: The invention relates to a sensor, comprising a sensor element (1) that operates without contact, an electronic component (5), and a housing (2) having an electrical/electronic connection. The sensor element (1) is part of the housing (2) and is used to close and seal the housing (2) with respect to the measurement side (3).

Abstract: Sensor with a one-layer or multi-layer sensor element operating in a contact-free manner and a housing comprising an electric/electronic connection and, in given cases, electronic components, where the sensor element comprises a coil arrangement whose windings have a defined line width, line thickness, and line spacing per layer and whose layers have a defined layer thickness and, in given cases, a defined layer spacing, characterized in that the sensor element is built up from ceramic layers in the sense of multi-layer ceramics and that with respect to traditional coil arrangements the line width is reduced and the number of windings per cross-sectional surface area is increased.