Patents by Inventor Tobias ZICKENROTT

Tobias ZICKENROTT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210164092
    Abstract: The invention relates to a device and a method for producing layers with very good uniformity in coating systems with horizontally rotating substrate guiding. Alternatively, certain layer thickness gradients can be set. The particle loading is also significantly reduced. The service life is much higher compared to other methods. Parasitic coatings are reduced. The coating rate is also increased.
    Type: Application
    Filed: August 9, 2019
    Publication date: June 3, 2021
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
    Inventors: Michael VERGÖHL, Andreas PFLUG, Stefan BRUNS, Tobias ZICKENROTT
  • Publication number: 20160254127
    Abstract: The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For this purpose, a method and a device are proposed. The approach is the use of target materials and also possibly of surfaces in the sputtering field. Particularly high uniformity and also particularly low residual absorption are achieved with these materials. The invention is suitable for the production of optical thin-film filters, as are used for example in laser material machining, laser components, optical sensors for measuring technology, or in medical diagnostics.
    Type: Application
    Filed: October 16, 2014
    Publication date: September 1, 2016
    Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
    Inventors: Michael VERGÖHL, Daniel RADEMACHER, Tobias ZICKENROTT