Patents by Inventor Tobjorn Sandstrom

Tobjorn Sandstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alignment sensor
    Publication number: 20030128367
    Abstract: The present invention relates in general to detection of an alignment mark on a workpiece. More particularly, interferometry is applied to detect alignment signals from the surface of a workpiece such as a wafer or reticle. Other aspects of the present invention are reflected in the detailed description, figures and claims.
    Type: Application
    Filed: December 4, 2002
    Publication date: July 10, 2003
    Inventor: Tobjorn Sandstrom