Patents by Inventor Tobrjorn Sandstrom

Tobrjorn Sandstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7460208
    Abstract: A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.
    Type: Grant
    Filed: February 18, 2005
    Date of Patent: December 2, 2008
    Assignee: ASML Netherlands B.V.
    Inventors: Arno Jan Bleeker, Dominicus Jacobus Petrus Adrianus Franken, Martinus Hendricus Hendricus Hoeks, Lambertus Gerardus Maria Kessels, Tobrjörn Sandström
  • Lithographic apparatus and device manufacturing method
    Publication number: 20060187428
    Abstract: A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.
    Type: Application
    Filed: February 18, 2005
    Publication date: August 24, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Arno Bleeker, Dominicus Adrianus Franken, Martinus Hendricus Hoeks, Lambertus Kessels, Tobrjorn Sandstrom