Abstract: A downstream plasma reactor system incorporating a plasma-resistant blocking member is presented. In an embodiment, the system preferably includes a sealing member and a plasma-resistant blocking member. The sealing member may be arranged between a plasma tube and an inlet conduit configured to be in gaseous communication with a reaction chamber. The blocking member preferably extends from a discharge opening of the plasma tube into the inlet conduit to inhibit plasma exiting the discharge opening from passing the blocking member to contact the sealing member. Being so configured, the downstream plasma reactor system may have an improved mean time between failure of the seal between the plasma tube and the inlet chamber without compromising seal effectiveness.

Abstract: An etch apparatus is presented including a grounding mechanism which maintains a low resistance electrical ground path between a plate electrode and a chamber despite temperature variations. The etch apparatus includes a chamber having a removable upper housing, a plate electrode positioned within the upper housing, and a grounding mechanism positioned between the plate electrode and the upper housing such that it contacts both the plate electrode and the upper housing. The grounding mechanism electrically couples the plate electrode to the upper housing. Several embodiments of the grounding mechanism include at least one sheet of metal folded to form two sections extending in an acute angle relative to one another. In two embodiments, the folded sheet of metal forms two sections meeting at a crease. Each of the two sections has an outer edge opposite the crease.

Abstract: A downstream plasma reactor system is presented. The reactor system includes a reaction chamber. An inlet conduit is connected to the reaction chamber. A plasma tube is coupled to the inlet conduit. A sealing member is interposed between the plasma tube and the inlet conduit. A blocking member, preferably containing a fluorocarbon polymer, is also interposed between the plasma tube and the inlet conduit. The blocking member is positioned closer to the discharge opening of the plasma tube than the sealing member and is preferably capable of preventing a substantial quantity of plasma-generated reactive species from reaching the sealing member during operation of the reactor system.