Patents by Inventor Toby Linder

Toby Linder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR MEMS DEVICES
    Publication number: 20250362491
    Abstract: Systems and methods for MEMS devices are disclosed. A method includes forming an opening in sacrificial material disposed on a hinge and above a substrate of a micromirror assembly to expose at least a portion of a surface of the hinge; depositing, on the exposed portion of the surface and on the sacrificial material, a first layer of material comprised of a titanium aluminum alloy; and depositing a second layer of material over the first layer of material, the second layer of material comprised of aluminum.
    Type: Application
    Filed: August 7, 2025
    Publication date: November 27, 2025
    Inventors: Toby Linder, John Hamlin, Kelly J. Taylor
  • System and method for MEMS devices
    Patent number: 12411337
    Abstract: Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure further includes an aluminum layer on the first layer.
    Type: Grant
    Filed: February 25, 2022
    Date of Patent: September 9, 2025
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Toby Linder, John Hamlin, Kelly J. Taylor
  • SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES
    Publication number: 20230305291
    Abstract: Systems and methods to reduce stiction in MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate; a via supported by the substrate, the via comprising a first metal layer comprising a material; an arm extending away from and supported by the via, the arm comprising the material; and a second metal layer within the via on the first metal layer, wherein the second metal layer comprises nitrogen.
    Type: Application
    Filed: May 17, 2022
    Publication date: September 28, 2023
    Inventors: Lisa Wesneski, Toby Linder, Timothy Patterson
  • SYSTEM AND METHOD FOR MEMS DEVICES
    Publication number: 20230273423
    Abstract: Systems and methods for MEMS devices are disclosed. A microelectromechanical system (MEMS) device includes a substrate, and a MEMS structure supported by the substrate. The MEMS structure includes a first layer of a first material comprising a titanium aluminum alloy. The MEMS structure furth includes an aluminum layer on the first layer.
    Type: Application
    Filed: February 25, 2022
    Publication date: August 31, 2023
    Inventors: Toby Linder, John Hamlin, Kelly J. Taylor