Abstract: A reduction in wafer processing cycle time is achieved by conducting wafer verification and slot randomization of a set of wafers as the wafers are moved through a singular processing location. In an example embodiment, a method of processing a set of wafers in a wafer processing system includes providing each of the wafers with a scribe code thereon. Each of the wafers is presented to a first processing location with the processing location having at least one processing chamber. The scribe code on each wafer is then read as the wafer is being placed into the processing chamber. Each wafer is processed and the set of wafers is slot randomized as they are removed from the first processing location and placed into a wafer cassette. An important advantage of the present invention is the reduced cycle times and reduced capital investment that this method and system bring to wafer processing.

Abstract: A fabrication clean room work station is portable and has a funnel-shaped cleaning area which is connected to a vacuum source through a bottom opening. The work station also has a perforated cover positioned across a top opening of the cleaning area to provide a work surface, a catch screen positioned across the bottom opening of the cleaning area to catch dropped parts, a funnel cover which slides over the cleaning area to enclose it, and a flexible tubing in communication with a port formed in the cleaning area. The port is positioned above the catch screen so that any parts vacuumed through the flexible tubing would be stopped by the catch screen. The vacuum source supplies vacuum at the work surface and at the flexible tubing. The vacuum at the flexible tubing is increased when the funnel cover is positioned above the cleaning area.