Abstract: The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and operational characteristics. The switches can be protected by suitable packaging, and can be efficiently fabricated in groups or arrays.

Abstract: The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and operational characteristics. The switches can be protected by suitable packaging, and can be efficiently fabricated in groups or arrays.

Abstract: Stable levitation of an object in an alternating magnetic field can be achieved by eliminating coupling between the rotational and translational forces acting on the object. Stable levitation can also be achieved by varying the coupling between the rotational and translational forces acting on the object, while maintaining one or more of the rotational and translational forces steady in time.

Abstract: Stable levitation of an object in an alternating magnetic field can be achieved by eliminating coupling between the rotational and translational forces acting on the object. Stable levitation can also be achieved by varying the coupling between the rotational and translational forces acting on the object, while maintaining one or more of the rotational and translational forces steady in time.

Abstract: The symmetry properties of a magnetic levitation arrangement are exploited to produce spin-stabilized magnetic levitation without aligning the rotational axis of the rotor with the direction of the force of gravity. The rotation of the rotor stabilizes perturbations directed parallel to the rotational axis.

Abstract: The present invention provides a switch suitable for efficient microfabrication. The switch elements are disposed in several layers. Various embodiments provide various switching capabilities and operational characteristics. The switches can be protected by suitable packaging, and can be efficiently fabricated in groups or arrays.

Abstract: A system to fabricate precise, high aspect ratio polymeric molds by photolithograpic processe is described. The molds for producing micro-scale parts from engineering materials by the LIGA process. The invention is a developer system for developing a PMMA photoresist having exposed patterns comprising features having both very small sizes, and very high aspect ratios between part minimum feature size and part overall dimension. The developer system of the present invention comprises a developer tank, an intermediate rinse tank and a final rinse tank, each tank having a source of high frequency sonic agitation, temperature control, and continuous filtration.