Abstract: A feed method and a feed device, comprising a vacuum pump for evacuation of a storage vessel for a precursor which is solid and/or liquid at room temperature and atmospheric pressure and for feeding the gaseous precursor which has been vaporized by evacuation, a first line section on the inlet side of the vacuum pump in order to produce a connection between the vacuum pump and the storage vessel for the solid and/or liquid precursor, at least one second line section for supplying carrier gas to the vacuum pump, and a monitoring device which can be connected to the first and the second line section and, during operation of the apparatus, provides open-loop and/or closed-loop control for the flow rate of the gaseous precursor and/or of the carrier gas, by keeping the partial pressure of the gaseous precursor below its saturation vapor pressure at least after it enters the pump.

Abstract: In order to allow feeding for supply of a gaseous precursor for further processing while avoiding condensation, and in order to allow the feed process to be carried out as simply and reliably as possible, the invention provides a feed method as well as a feed device (1), comprising a vacuum pump (2) for evacuation of a storage vessel (3) for a precursor which is solid and/or liquid at room temperature and atmospheric pressure and for feeding the gaseous precursor which has been vaporized by evacuation, a first line section (23) on the inlet side of the vacuum pump (2) in order to produce a connection between the vacuum pump (2) and the storage vessel (3) for the solid and/or liquid precursor, at least one second line section (24) for supplying carrier gas to the vacuum pump (2), and a monitoring device (5) which can be connected to the first and the second line section (24) and, during operation of the apparatus, provides open-loop and/or closed-loop control for the flow rate of the gaseous precursor and/or o

Abstract: A method for producing a substrate including a layer includes providing that the layer is a full or a partial surface macro-structured layer, applying a sol-gel solution in already structured form onto the substrate, and drying and/or baking, resulting in a sol-gel layer.

Abstract: The invention relates to objects, especially glass objects or glass ceramic objects, which are provided with a double coating to facilitate cleaning thereof. In order to ensure a coating that meets very strict test conditions developed for interior panes of baking ovens, said object comprises a double coating encompassing a hydrophobic outer layer that is provided with a component which reacts with a free OH group, and an inner inorganic sol-gel layer. The outer hydrophobic layer is applied to a highly reactive inner sol-gel layer that only begins to dry at moderate temperatures of up to a maximum of 100° C. and is firmly anchored thereto in a chemical manner by means of condensation reactions, whereupon the double-layer system is burned into the surface of the object at temperatures exceeding 50° C.