Patents by Inventor Todd Heckleman

Todd Heckleman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8190380
    Abstract: A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: May 29, 2012
    Assignee: MKS Instruments, Inc.
    Inventors: Ray Choueiry, Todd Heckleman, David J. Coumou
  • Publication number: 20120013352
    Abstract: A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
    Type: Application
    Filed: September 23, 2011
    Publication date: January 19, 2012
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Ray Choueiry, Todd Heckleman, David J. Coumou
  • Patent number: 8055203
    Abstract: A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
    Type: Grant
    Filed: June 14, 2007
    Date of Patent: November 8, 2011
    Assignee: MKS Instruments, Inc.
    Inventors: Ray Choueiry, Todd Heckleman, David J. Coumou
  • Patent number: 8040141
    Abstract: A radio frequency (RF) sensor that measures RF current includes a substrate that has an inner perimeter that defines an aperture. A conductor extends through the aperture. Sensor pads are arranged on the aperture and are connected to form two sensor loops. The loops generate an electrical signal that represents RF current flow through the center conductor. Additionally, a plurality of circular conductive rings may be included in the RF sensor to generate a signal representing the voltage of the conductor.
    Type: Grant
    Filed: April 9, 2009
    Date of Patent: October 18, 2011
    Assignee: MKS Instruments, Inc.
    Inventors: Todd Heckleman, David J. Coumou, Yogendra K. Chawla
  • Publication number: 20080227420
    Abstract: A metrology system monitors radio frequency (RF) power at a plurality of locations in a circuit. The system includes a plurality of RF sensors that generate respective analog signals based on electrical properties of the RF power, a multiplexing module that generates an output signal based on the analog signals, and an analysis module that generates messages based on the output signal. The messages contain information regarding the electrical properties that are sensed by the plurality of RF sensors.
    Type: Application
    Filed: June 14, 2007
    Publication date: September 18, 2008
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Ray Choueiry, Todd Heckleman, David J. Coumou