Patents by Inventor Todd Hiar
Todd Hiar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7274429Abstract: An integrated lithographic fabrication cluster system, as presented herein, comprises an exposure apparatus to expose a pattern onto a substrate with an associated exposure controller to control the exposure apparatus and a track apparatus interconnecting a plurality of processing modules with an associated track controller to control the track apparatus. The cluster system also comprises a wafer handling apparatus coupled to the exposure apparatus and track apparatus that is configured to transfer substrates between the processing modules utilized by the exposure apparatus and track apparatus and a wafer handling controller to control the wafer handling apparatus. The cluster system further comprises a cluster controller that communicates control information to at least one of the exposure controller, the track controller, and the wafer handling controller to manage operations of the exposure apparatus, the track apparatus, and the wafer handling apparatus during the lithographic fabrication process.Type: GrantFiled: December 10, 2003Date of Patent: September 25, 2007Assignee: ASML Netherlands B.V.Inventors: Theodore A. Paxton, Todd Hiar, Todd Davis
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Publication number: 20070046917Abstract: A lithographic apparatus operable in a substrate exposing configuration to expose a substrate with a pattern of radiation and a radiation beam inspection configuration in which the pattern of radiation that would be exposed on the substrate if the lithographic apparatus was in the substrate exposing configuration is inspected by a radiation beam inspection device. In the radiation beam inspecting configuration, the operation of the lithographic apparatus is modified in order to minimize the difference between the pattern of radiation exposed on the substrate and the required pattern of radiation to be exposed on the substrate.Type: ApplicationFiled: August 31, 2005Publication date: March 1, 2007Applicant: ASML Netherlands B.V.Inventors: Wim Tel, Hans Van Der Laan, Cassandra Owen, Todd Davis, Todd Hiar, Theodore Paxton
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Publication number: 20070003878Abstract: A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.Type: ApplicationFiled: July 11, 2005Publication date: January 4, 2007Applicant: ASML Netherlands B.V.Inventors: Theodore Paxton, Todd Davis, Todd Hiar, Cassandra Owen, Steven Hansen, James Hunter
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Publication number: 20060262287Abstract: A method, computer program product, and apparatus configured to improve attribute uniformity of a substrate is disclosed. In an embodiment, the method involves calculating corrective data based on measured values of an attribute of a substrate processed by a lithographic exposure apparatus, the corrective data configured to at least partially correct non-uniformity of the values of the substrate attribute by controlling the temperature generated by a zone of a thermal plate used to heat or cool the substrate, and making the corrective data available to the thermal plate.Type: ApplicationFiled: May 23, 2005Publication date: November 23, 2006Applicant: ASML NETHERLANDS B.V.Inventors: Todd Hiar, Theodore Paxton, Todd Davis, Cassandra Owen
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Publication number: 20060216649Abstract: A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form a patterned image having enhanced resolution.Type: ApplicationFiled: March 23, 2005Publication date: September 28, 2006Applicant: ASML Netherlands B.V.Inventors: Theodore Paxton, Todd Davis, Todd Hiar, Cassandra Owen, Steven Hansen
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Publication number: 20060216653Abstract: A lithographic method to enhance image resolution in a lithographic cluster using multiple projections and a lithographic cluster used to project multiple patterns to form images that are combined to form an image having enhanced resolution.Type: ApplicationFiled: March 23, 2006Publication date: September 28, 2006Applicant: ASML NETHERLANDS B.V.Inventors: Theodore Paxton, Steven Hansen, Cassandra Owen, Todd Davis, Todd Hiar, James Hunter
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Patent number: 7019268Abstract: A system, apparatus, and method for thermal processing of substrates undergoing lithographic chemical processes is provided. The thermal processing system includes at least one heating element, a heat distributing plate, having a heating surface and being disposed in thermal communication with the at least one heating element. The heat distributing plate is constructed and arranged to distribute heat from the heating element onto the heating surface. A substrate support, supports a substrate at a position above the heating surface and the system includes an actuator that rotates the substrate relative to the heating surface during a heat transfer operation.Type: GrantFiled: February 23, 2004Date of Patent: March 28, 2006Assignee: ASML Netherlands B.V.Inventors: Theodore A. Paxton, Todd Hiar
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Publication number: 20050184043Abstract: A system, apparatus, and method for thermal processing of substrates undergoing lithographic chemical processes is provided. The thermal processing system includes at least one heating element, a heat distributing plate, having a heating surface and being disposed in thermal communication with the at least one heating element. The heat distributing plate is constructed and arranged to distribute heat from the heating element onto the heating surface. A substrate support, supports a substrate at a position above the heating surface and the system includes an actuator that rotates the substrate relative to the heating surface during a heat transfer operation.Type: ApplicationFiled: February 23, 2004Publication date: August 25, 2005Applicant: ASML NETHERLANDS B.V.Inventors: Theodore Paxton, Todd Hiar
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Publication number: 20050128464Abstract: An integrated lithographic fabrication cluster system, as presented herein, comprises an exposure apparatus to expose a pattern onto a substrate with an associated exposure controller to control the exposure apparatus and a track apparatus interconnecting a plurality of processing modules with an associated track controller to control the track apparatus. The cluster system also comprises a wafer handling apparatus coupled to the exposure apparatus and track apparatus that is configured to transfer substrates between the processing modules utilized by the exposure apparatus and track apparatus and a wafer handling controller to control the wafer handling apparatus. The cluster system further comprises a cluster controller that communicates control information to at least one of the exposure controller, the track controller, and the wafer handling controller to manage operations of the exposure apparatus, the track apparatus, and the wafer handling apparatus during the lithographic fabrication process.Type: ApplicationFiled: December 10, 2003Publication date: June 16, 2005Applicant: ASML NETHERLANDS B.V.Inventors: Theodore Paxton, Todd Hiar, Todd Davis
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Publication number: 20050075819Abstract: A system, apparatus, and method for improving CD uniformity in lithographic system is presented herein. The system includes an exposure apparatus configured to expose substrates, a track apparatus that is operatively coupled to the exposure apparatus and a plurality of processing modules and apparatus. The system also includes a measuring device configured to measure attributes of the exposed and processed substrates and to assess whether the exposed and processed substrate attributes are uniform based on pre-specified substrate profile information. The system further includes a module configured to adaptively calculate corrective exposure data based on the measured attributes upon determining that said attributes are not uniform. The corrective exposure data is configured to correct for non-uniformities in the substrates by regulating the exposure dosage of the exposure apparatus.Type: ApplicationFiled: September 17, 2003Publication date: April 7, 2005Applicant: ASML Netherlands B.V.Inventors: Theodore Paxton, Todd Hiar, Wim Tel, Todd Davis
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Patent number: 6873938Abstract: A system, apparatus, and method for improving CD uniformity in lithographic system is presented herein. The system includes an exposure apparatus configured to expose substrates, a track apparatus that is operatively coupled to the exposure apparatus and a plurality of processing modules and apparatus. The system also includes a measuring device configured to measure attributes of the exposed and processed substrates and to assess whether the exposed and processed substrate attributes are uniform based on pre-specified substrate profile information. The system further includes a module configured to adaptively calculate corrective exposure data based on the measured attributes upon determining that said attributes are not uniform. The corrective exposure data is configured to correct for non-uniformities in the substrates by regulating the exposure dosage of the exposure apparatus.Type: GrantFiled: September 17, 2003Date of Patent: March 29, 2005Assignee: ASML Netherlands B.V.Inventors: Theodore A. Paxton, Todd Hiar, Wim Tel, Todd Davis