Patents by Inventor Todd M. Petit

Todd M. Petit has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical metrology with purged reference chip
    Patent number: 10082461
    Abstract: An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device, and a reference chip purge device provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. The reference chip purge device may be static or movable with the reference chip.
    Type: Grant
    Filed: July 24, 2015
    Date of Patent: September 25, 2018
    Assignee: Nanometrics Incorporated
    Inventors: Andrew S. Klassen, Andrew J. Hazelton, Andrew H. Barada, Todd M. Petit, Chuan Sheng Tu
  • OPTICAL METROLOGY WITH PURGED REFERENCE CHIP
    Publication number: 20160033399
    Abstract: An integrated metrology module includes a chuck for holding a sample and positioning the sample with respect to an optical metrology device, a reference chip for the optical metrology device, the reference chip being movable to various positions with respect to the optical metrology device, and a reference chip purge device provides a flow of purge gas or air over the reference chip while the reference chip is in the various positions. The reference chip purge device may be static or movable with the reference chip.
    Type: Application
    Filed: July 24, 2015
    Publication date: February 4, 2016
    Inventors: Andrew S. KLASSEN, Andrew J. Hazelton, Andrew H. Barada, Todd M. Petit, Chuan Sheng Tu