Abstract: A substrate transfer arm includes: a support including an upper surface that faces a substrate and is configured to support the substrate, and a conductive surface that is connected to a ground portion having a ground potential; a conductive pad provided on the upper surface of the support, and configured to support the substrate in contact with a lower surface of the substrate in such a way that the substrate is not brought into contact with the support; and a conductive portion configured to connect the conductive pad and the surface of the support. The conductive portion is located below the upper surface of the conductive pad contacting the substrate and is connected to the conductive pad.

Abstract: A substrate transfer apparatus includes: a non-conductive support with an upper surface that faces a substrate and supports the substrate; a mover that moves the support to transfer the substrate; a connector that connects the support and the mover while being grounded; a conductive contact that is provided on the upper surface of the support, and supports the substrate in contact with a lower surface of the substrate such that the substrate is not brought into contact with the support; a strip-shaped conductive path that is provided to connect the contact and the connector. The strip-shaped conductive path is provided with a bent portion such that an interval of the strip-shaped conductive path formed by the bent portion is at least twice a width of the strip-shaped conductive path.

Abstract: A substrate transfer apparatus includes: a non-conductive support with an upper surface that faces a substrate and supports the substrate; a mover that moves the support to transfer the substrate; a connector that connects the support and the mover while being grounded; a conductive contact that is provided on the upper surface of the support, and supports the substrate in contact with a lower surface of the substrate such that the substrate is not brought into contact with the support; a strip-shaped conductive path that is provided to connect the contact and the connector. The strip-shaped conductive path is provided with a bent portion such that an interval of the strip-shaped conductive path formed by the bent portion is at least twice a width of the strip-shaped conductive path.