Patents by Inventor Tokio TOYAMA

Tokio TOYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus
    Patent number: 11776105
    Abstract: A contaminant detection system includes a light source configured to emit excitation light on an object to be inspected; a detector configured to detect fluorescence emitted from a contaminant adhering to the object to be inspected; and a processor. The fluorescence is caused by emission of the excitation light from the light source onto the object to be inspected. The processor is configured to perform a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant; and output a result of the determination.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: October 3, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Tsuyoshi Moriya, Yoshitaka Enoki, Tokio Toyama, Michihiro Takahashi, Takuya Mori
  • CONTAMINANT DETECTION SYSTEM, CONTAMINANT DETECTING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20210327045
    Abstract: A contaminant detection system includes a light source configured to emit excitation light on an object to be inspected; a detector configured to detect fluorescence emitted from a contaminant adhering to the object to be inspected; and a processor. The fluorescence is caused by emission of the excitation light from the light source onto the object to be inspected. The processor is configured to perform a determination of a location of the contaminant and a type of the contaminant, based on the fluorescence emitted from the contaminant; and output a result of the determination.
    Type: Application
    Filed: April 6, 2021
    Publication date: October 21, 2021
    Inventors: Tsuyoshi MORIYA, Yoshitaka ENOKI, Tokio TOYAMA, Michihiro TAKAHASHI, Takuya MORI