Patents by Inventor Tokuo Watanabe

Tokuo Watanabe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma ashing method and apparatus therefor
    Patent number: 5226056
    Abstract: In a method for plasma ashing a resist film coated on a substrate, the temperature of the substrate is controlled initially at temperatures below that at which explosion of the resist film occurs until a surface portion of a resist film has been removed. Thereafter, the substrate temperature is increased to remove the remaining portions of the resist film. An apparatus for conducting the method includes a plurality of supports, which may be movably disposed within a vacuum treatment chamber for moving the substrate away from a source of heat and for moving the substrate into contact with the heating source.
    Type: Grant
    Filed: January 9, 1990
    Date of Patent: July 6, 1993
    Assignee: Nihon Shinku Gijutsu Kabushiki Kaisha
    Inventors: Masashi Kikuchi, Toshinari Takata, Tokuo Watanabe