Patents by Inventor Tolga Erguder

Tolga Erguder has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adaptive controller for ion source
    Patent number: 7853364
    Abstract: An ion source, often used for materials processing applications in a vacuum processing chamber, is provided with an adaptive control system. The adaptive control system has a microprocessor and memory that regulate the inputs of power and gas flow into the ion source. The adaptive control system monitors and stores the dynamic input impedance properties and status of input devices to the ion source. The adaptive control system may additionally control magnetic fields within the ion source. The adaptive control system provides a multivariable control for driving any combination of input power, gas flow, magnetic field, or electrostatic ion beam extraction or acceleration field into the ion source.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: December 14, 2010
    Assignee: Veeco Instruments, Inc.
    Inventors: James D. Deakins, Dennis J. Hansen, Leonard J. Mahoney, Tolga Erguder, David M. Burtner
  • ADAPTIVE CONTROLLER FOR ION SOURCE
    Publication number: 20080129209
    Abstract: An ion source, often used for materials processing applications in a vacuum processing chamber, is provided with an adaptive control system. The adaptive control system has a microprocessor and memory that regulate the inputs of power and gas flow into the ion source. The adaptive control system monitors and stores the dynamic input impedance properties and status of input devices to the ion source. The adaptive control system may additionally control magnetic fields within the ion source. The adaptive control system provides a multivariable control for driving any combination of input power, gas flow, magnetic field, or electrostatic ion beam extraction or acceleration field into the ion source.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 5, 2008
    Applicant: VEECO INSTRUMENTS, INC.
    Inventors: James D. Deakins, Dennis J. Hansen, Leonard J. Mahoney, Tolga Erguder, David M. Burtner