Patents by Inventor Tom Blasingame

Tom Blasingame has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated arc and polysilicon etching process
    Patent number: 5885902
    Abstract: A composite of an anti-reflective coating on polysilicon is accurately etched to form a polysilicon pattern by initially etching the ARC with gaseous plasma containing helium and/or nitrogen which is substantially inert with respect to polysilicon.
    Type: Grant
    Filed: November 5, 1997
    Date of Patent: March 23, 1999
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Tom Blasingame, Subash Gupta, Scott A. Bell
  • Integrated arc and polysilicon etching process
    Patent number: 5763327
    Abstract: A composite of an anti-reflective coating on polysilicon is accurately etched to form a polysilicon pattern by initially etching the ARC with gaseous plasma containing helium and/or nitrogen which is substantially inert with respect to polysilicon.
    Type: Grant
    Filed: November 8, 1995
    Date of Patent: June 9, 1998
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Tom Blasingame, Subash Gupta, Scott A. Bell