Patents by Inventor Tom Blount

Tom Blount has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of improving adhesion between thin films
    Patent number: 5714037
    Abstract: Methods for improving adhesion between various materials utilized in the fabrication of integrated circuits. A first method relates to improving adhesion between a silicon nitride layer and a silicon dioxide layer. The method includes treating a surface of the silicon dioxide layer with a nitrogen plasma in a reactive ion etching process prior to depositing the silicon nitride film on the surface of the silicon dioxide layer. A second method relates to improving adhesion between a silicon nitride layer and a polyimide layer. The method includes the step of treating a surface of the silicon nitride layer with a oxygen/argon plasma in a reactive ion etching process prior to depositing the polyimide layer film on the surface of the silicon nitride layer. A third method relates to improving adhesion between a photoresist layer and a metal.
    Type: Grant
    Filed: May 17, 1996
    Date of Patent: February 3, 1998
    Assignee: Microunity Systems Engineering, Inc.
    Inventors: Kumar D. Puntambekar, K. Y. Ramanujam, Tom Blount, Ray Liang