Patents by Inventor Tom Bramblett

Tom Bramblett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for cleaning edges of contaminated substrates
    Patent number: 6334229
    Abstract: An apparatus for cleaning edges of substrates is described. The present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based on friction and/or a difference in tangential velocity at a point of contact between the wafer and the cleaning mechanism.
    Type: Grant
    Filed: January 7, 1999
    Date of Patent: January 1, 2002
    Assignee: Lam Research Corporation
    Inventors: Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett, John M. deLarios, Lynn S. Ryle, Donald E. Anderson, Wilbur C. Krusell
  • Method and apparatus for cleaning edges of contaminated substrates
    Patent number: 5861066
    Abstract: A method and apparatus for cleaning edges of substrates is described. The present invention provides a cleaning mechanism that cleans particles off the edge of the wafer based on friction and/or a difference in tangential velocity at a point of contact between the wafer and the cleaning mechanism.
    Type: Grant
    Filed: May 1, 1996
    Date of Patent: January 19, 1999
    Assignees: OnTrak Systems, Inc., Intel Corporation
    Inventors: Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett, John M. deLarios, Lynn S. Ryle, Donald E. Anderson, Wilbur C. Krusell