Patents by Inventor Tom Carr

Tom Carr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7554654
    Abstract: In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.
    Type: Grant
    Filed: January 26, 2007
    Date of Patent: June 30, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Steven W. Meeks, Romain Sappey, Tom Carr
  • Publication number: 20080180656
    Abstract: In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a scatterometer to identify at least one defect region on the surface and a surface profile height measuring tool to measure one or more characteristics of the surface in the defect region with a surface profile height measuring tool.
    Type: Application
    Filed: January 26, 2007
    Publication date: July 31, 2008
    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION
    Inventors: Steven W. Meeks, ROMAIN SAPPEY, TOM CARR
  • Publication number: 20060119977
    Abstract: A system and methods for efficiently performing media writing functions is disclosed. The system and methods include: detecting media movement with respect to a base and heads during reading and writing, and moving the heads in response; using an interferometer, such as a dual beam differential interferometer, to dynamically monitor disk position and address perceived errors; and minimizing repeatable and non repeatable runout error by writing data, such as servo bursts, in multiple revolutions to average adverse runout conditions. The present system has the ability to use an interferometer to enhance media certification and perform on line, in situ monitoring of the media, and includes shrouding, head mounting, disk biasing, and related mechanical aspects beneficial to media writing.
    Type: Application
    Filed: September 28, 2005
    Publication date: June 8, 2006
    Inventors: Jun Zhu, Alex Moraru, Teodor Zanetti, Franklin Tao, Dan Kilmer, Harald Hess, Tom Carr, Matt Bellis, Gustavo Pinto, Patrick Lee
  • Patent number: 6977791
    Abstract: A system and methods for efficiently performing media writing functions is disclosed. The system and methods include: detecting media movement with respect to a base and heads during reading and writing, and moving the heads in response; using an interferometer, such as a dual beam differential interferometer, to dynamically monitor disk position and address perceived errors; and minimizing repeatable and non repeatable runout error by writing data, such as servo bursts, in multiple revolutions to average adverse runout conditions. The present system has the ability to use an interferometer to enhance media certification and perform on line, in situ monitoring of the media, and includes shrouding, head mounting, disk biasing, and related mechanical aspects beneficial to media writing.
    Type: Grant
    Filed: March 22, 2003
    Date of Patent: December 20, 2005
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Jun Zhu, Alex Moraru, Teodor Zanetti, Franklin Tao, Dan L. Kilmer, Harald Hess, Tom Carr, Matt Bellis, Gustavo A. Pinto, Patrick Rodney Lee
  • Publication number: 20040125488
    Abstract: A system and methods for efficiently performing media writing functions is disclosed. The system and methods include: detecting media movement with respect to a base and heads during reading and writing, and moving the heads in response; using an interferometer, such as a dual beam differential interferometer, to dynamically monitor disk position and address perceived errors; and minimizing repeatable and non repeatable runout error by writing data, such as servo bursts, in multiple revolutions to average adverse runout conditions. The present system has the ability to use an interferometer to enhance media certification and perform on line, in situ monitoring of the media, and includes shrouding, head mounting, disk biasing, and related mechanical aspects beneficial to media writing.
    Type: Application
    Filed: March 22, 2003
    Publication date: July 1, 2004
    Inventors: Jun Zhu, Alex Moraru, Teodor Zanetti, Franklin Tao, Dan L. Kilmer, Harald Hess, Tom Carr, Gustavo A. Pinto, Patrick Rodney Lee