Patents by Inventor Tom Deacon

Tom Deacon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating apparatus and semiconductor manufacturing apparatus
    Publication number: 20080152328
    Abstract: It is an object to provide a heating apparatus and semiconductor manufacturing apparatus which can carry out a fine heating temperature control easily. A heating apparatus for heating a semiconductor substrate placed on a support arranged in a reaction chamber of a semiconductor manufacturing apparatus includes a plurality of heat source units, each of which has a heat source lamp being attachable and detachable, and being attachable by changing orientations in the circumferential direction. A semiconductor manufacturing apparatus includes: a reaction chamber to which a reaction gas is supplied; a support arranged in the reaction chamber; and a heating apparatus which heats a semiconductor substrate placed on the support, wherein the heating apparatus includes a plurality of heat source units, each of which has a heat source lamp being attachable and detachable, and being attachable by changing orientations in the circumferential direction.
    Type: Application
    Filed: August 30, 2007
    Publication date: June 26, 2008
    Inventors: Akira Okabe, Tom Deacon
  • Modular chair
    Patent number: D435976
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: January 9, 2001
    Assignee: Keilhauer Industries Limited
    Inventor: Tom Deacon
  • Modular chair
    Patent number: D437703
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: February 20, 2001
    Assignee: Keilhauer Industries Limited
    Inventor: Tom Deacon
  • Modular chair
    Patent number: D422802
    Type: Grant
    Filed: December 10, 1997
    Date of Patent: April 18, 2000
    Assignee: Keilhauer Industries Limited
    Inventor: Tom Deacon
  • Modular chair
    Patent number: D434575
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: December 5, 2000
    Assignee: Keilhauer Industries Limited
    Inventor: Tom Deacon