Patents by Inventor Tom G. Miller

Tom G. Miller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High-speed high-efficiency solid-state electron detector
    Patent number: 7714300
    Abstract: One embodiment relates to a solid-state charged-particle detector. The detector includes a PIN diode and a conductive coating on the front-side of the PIN diode, wherein the front-side receives incident charged particles to be detected. In addition, the detector includes a metal layer on the backside of the PIN diode and electrical connections to the metal layer and to the conductive coating. Other embodiment are also disclosed.
    Type: Grant
    Filed: February 26, 2007
    Date of Patent: May 11, 2010
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Mark A. McCord, Tom G. Miller, David L. Brown
  • Contactless total charge measurement with corona
    Patent number: 6448804
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer, and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: September 27, 2001
    Date of Patent: September 10, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless total charge measurement with corona
    Publication number: 20020008536
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Application
    Filed: September 27, 2001
    Publication date: January 24, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona charge
    Patent number: 6335630
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: December 26, 2000
    Date of Patent: January 1, 2002
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Contactless total charge measurement with corona
    Publication number: 20010000651
    Type: Application
    Filed: December 26, 2000
    Publication date: May 3, 2001
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Non-contact electrical conduction measurement for insulating films
    Patent number: 6202029
    Abstract: A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.
    Type: Grant
    Filed: June 20, 2000
    Date of Patent: March 13, 2001
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller
  • Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
    Patent number: 6191605
    Abstract: A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
    Type: Grant
    Filed: August 18, 1997
    Date of Patent: February 20, 2001
    Inventors: Tom G. Miller, Roger L. Verkuil, Gregory S. Horner
  • Non-contact tunnelling field measurement for a semiconductor oxide layer
    Patent number: 6097196
    Abstract: A corona source is used to repetitively apply charge to an oxide layer on a semiconductor. A Kelvin probe is used to measure the resulting voltage across the layer. The tunneling field is determined based on the value of voltage at which the voltage measurement saturates.
    Type: Grant
    Filed: April 23, 1997
    Date of Patent: August 1, 2000
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller
  • Apparatus and method for depositing uniform charge on a thin oxide semiconductor wafer
    Patent number: 6060709
    Abstract: A conductive slit screen is placed between a corona gun and the surface of a semiconductor wafer. The charge deposited on the wafer by the gun is controlled by a potential applied to the screen. A chuck orients the wafer in close proximity to the screen. A desired charge is applied to the wafer by depositing alternating polarity corona charge until the potential of the wafer equals the potential of the screen.
    Type: Grant
    Filed: December 31, 1997
    Date of Patent: May 9, 2000
    Inventors: Roger L. Verkuil, Gregory S. Horner, Tom G. Miller