Abstract: The subject matter of this specification can be embodied in, among other things, a multi-axis rotary actuator that includes a first rotary piston actuator configured to controllably actuate a first pivotal joint between a first linkage to a second linkage about a first axis, and a second rotary piston actuator configured to controllably actuate a second pivotal joint connecting the second linkage to a third linkage about a second axis.

Abstract: The subject matter of this specification can be embodied in, among other things, a fluid actuator including a housing defining a first chamber having a first cavity and a first open end, a first piston assembly including a tubular first piston defining a second chamber having a second cavity and a second open end, disposed in said first housing for reciprocal movement in the first chamber through the first open end, wherein a first seal, the first cavity, and the first piston define a first pressure chamber, and a second piston assembly having an second piston disposed in said first piston assembly for reciprocal movement in the second chamber through the second open end, wherein a second seal, the second cavity, and the second piston define a second pressure chamber, and a first portion of the second piston contacts a first end effector.