Patents by Inventor Tom L. Roberts

Tom L. Roberts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for forming a thin film with a mist forming means
    Patent number: 5316579
    Abstract: A method and apparatus are disclosed for generating fine mists of liquids using a rotating turbine blade disposed within an enclosure. A mixture of a liquid and a carrier gas are flowed into the enclosure such that it immediately impacts on the rotating turbine blade disposed near a lower end of the enclosure, and the resulting mist is withdrawn under vacuum near an upper end of the enclosure. A method and apparatus are also disclosed for chemical vapor deposition of thin films of complex chemical compounds using the discussed mists.
    Type: Grant
    Filed: May 4, 1992
    Date of Patent: May 31, 1994
    Assignee: Symetrix Corporation
    Inventors: Larry D. McMillan, Carlos A. Paz de Araujo, Tom L. Roberts