Patents by Inventor Tom Moebert

Tom Moebert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus
    Patent number: 11631168
    Abstract: Methods and apparatuses for determining a quality of a mask of a photolithography apparatus are provided, which comprise a parallel calculation, using a plurality of computing devices, of a reference aerial image on the basis of a design of the mask and optical properties of the photolithography apparatus on a plurality of computing devices.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: April 18, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Tom Moebert, Dirk Seidel, Carsten Schmidt, Konrad Schoebel
  • METHOD, COMPUTER PROGRAM AND APPARATUS FOR DETERMINING A QUALITY OF A MASK OF A PHOTOLITHOGRAPHY APPARATUS
    Publication number: 20200410656
    Abstract: Methods and apparatuses for determining a quality of a mask of a photolithography apparatus are provided, which comprise a parallel calculation, using a plurality of computing devices, of a reference aerial image on the basis of a design of the mask and optical properties of the photolithography apparatus on a plurality of computing devices.
    Type: Application
    Filed: June 26, 2020
    Publication date: December 31, 2020
    Inventors: Tom Moebert, Dirk Seidel, Carsten Schmidt, Konrad Schoebel