Patents by Inventor Tom Torack

Tom Torack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for forming an epitaxial silicon wafer with a denuded zone
    Publication number: 20020078882
    Abstract: An apparatus and method are provided for forming a denuded zone and an epitaxial layer on a semiconductor wafer used in manufacturing electronic components. The denuded zone and epitaxial layer are formed in one chamber. The apparatus includes a plurality of upstanding pins immovably mounted on a susceptor and maintain a semiconductor wafer spaced from the susceptor during both application of the epitaxial layer and formation of the denuded zone. Fast cooling of the wafer is accomplished by having the wafer out of conductive heat transfer relation with the susceptor during cooling thereof.
    Type: Application
    Filed: January 15, 2002
    Publication date: June 27, 2002
    Applicant: MEMC Electronic Materials Inc.
    Inventors: Tom Torack, Michael J. Ries
  • Method and apparatus for forming an epitaxial silicon wafer with a denuded zone
    Patent number: 6339016
    Abstract: An apparatus and method are provided for forming a denuded zone and an epitaxial layer on a semiconductor wafer used in manufacturing electronic components. The denuded zone and epitaxial layer are formed in one chamber. The apparatus includes a plurality of upstanding pins immovably mounted on a susceptor and maintain a semiconductor wafer spaced from the susceptor during both application of the epitaxial layer and formation of the denuded zone. Fast cooling of the wafer is accomplished by having the wafer out of conductive heat transfer relation with the susceptor during cooling thereof.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: January 15, 2002
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Tom Torack, Michael John Ries