Abstract: A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.

Abstract: A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample. which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

Abstract: A detection apparatus and method for detecting charged particles. The device relies on a detection assembly comprising microchannel plates. The useful surface of the microchannel plate device is maximized in time through the use of beam deflection means upstream of the detection front.

Abstract: A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

Abstract: A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.

Abstract: A detection device for detecting charges particles. The active area of the detector extends along a principal direction over several centimeters and up to 1 meter or more. This allows for its use as a focal plane detector for a mass spectrometer device, allowing to record all mass-to-charge ratios provided by the spectrometer in parallel and within a reduced acquisition time.

Abstract: A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.

Abstract: A Hall probe comprising a Hall effect sensing element. The probe is capable of precisely measuring the strength of a magnetic field in high-voltage and vacuum environments.

Abstract: A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

Abstract: The invention provides an electron-impact ion source device having high brightness as compared to known Nier-type ion sources, while providing similar advantages in terms of flexibility of the generated ion species, for example. The ionization chamber of the device operates at high pressures and provides for a large number of interactions between the electron beam and the gas molecules.

Abstract: A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.

Abstract: An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and being separated from each other by a pole piece gap defining a passage for the charged particles to be deflected; the yoke forming a bridge over the two pole pieces thus defining a magnetic circuit. The electromagnet assembly further comprises one electrical circuit for generating a magnetic flux in the magnetic circuit, the electrical circuit being included in the yoke. The electromagnet assembly is remarkable in that the pole pieces are electrically insulated from the electrical circuit and from the yoke by first electrical insulating means and are electrically insulated from the vacuum chamber.

Abstract: The invention provides an electron-impact ion source device having high brightness as compared to known Nier-type ion sources, while providing similar advantages in terms of flexibility of the generated ion species, for example. The ionization chamber of the device operates at high pressures and provides for a large number of interactions between the electron beam and the gas molecules.

Abstract: A Hall probe comprising a Hall effect sensing element. The probe is capable of precisely measuring the strength of a magnetic field in high-voltage and vacuum environments.

Abstract: An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and being separated from each other by a pole piece gap defining a passage for the charged particles to be deflected; the yoke forming a bridge over the two pole pieces thus defining a magnetic circuit. The electromagnet assembly further comprises one electrical circuit for generating a magnetic flux in the magnetic circuit, the electrical circuit being included in the yoke. The electromagnet assembly is remarkable in that the pole pieces are electrically insulated from the electrical circuit and from the yoke by first electrical insulating means and are electrically insulated from the vacuum chamber.

Abstract: The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes, which allow to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.

Abstract: The present invention relates to a mass spectrometer device comprising a source of ions, an electrostatic sector, a non-scanning magnetic sector arranged downstream of the electrostatic sector, for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. A magnetic shunt is arranged in the drift space between the electrostatic sector and the magnetic sector. The proposed position of the magnetic shunt enhances the resolving power of the mass spectrometer device.

Abstract: The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes, which allow to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.

Abstract: The present invention relates to a mass spectrometer device comprising a source of ions, an electrostatic sector, a non-scanning magnetic sector arranged downstream of the electrostatic sector, for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. A magnetic shunt is arranged in the drift space between the electrostatic sector and the magnetic sector. The proposed position of the magnetic shunt enhances the resolving power of the mass spectrometer device.

Abstract: A method and an analytical instrument are for quantitative investigations of organic and inorganic samples using the Secondary Ion Mass Spectromy (SIMS) technique. The sputtering process is decoupled from the analysis process.