Patents by Inventor Tom X. Tong

Tom X. Tong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6387572
    Abstract: A substrate for reflective EUV lithography that includes a first layer that has a low coefficient of thermal expansion and a second layer, formed on the first layer, that has a high surface quality. The second layer may have a coefficient of thermal expansion that is higher than the coefficient of thermal expansion of the first layer.
    Type: Grant
    Filed: September 13, 1999
    Date of Patent: May 14, 2002
    Assignee: Intel Corporation
    Inventors: Tom X. Tong, Kramadhati V. Ravi