Patents by Inventor Tomas Plettner
Tomas Plettner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11927549Abstract: The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.Type: GrantFiled: September 9, 2021Date of Patent: March 12, 2024Assignee: KLA CORPORATIONInventors: Qian Zhang, Wayne Chiwoei Lo, Joseph Maurino, Tomas Plettner
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Patent number: 11615939Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.Type: GrantFiled: March 24, 2021Date of Patent: March 28, 2023Assignee: KLA CorporationInventors: Tomas Plettner, Ernesto Escorcia, Sameet K. Shriyan, Jeong Ho Lee
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Publication number: 20230076175Abstract: The present disclosure provides an inspection system and a method of stray field mitigation. The system includes an array of electron beam columns, a first permanent magnet array, and a plurality of shielding plates. The array of electron beam columns each includes an electron source configured to emit electrons toward a stage. The first permanent magnet array is configured to condense the electrons from each electron source into an array of electron beams. The first permanent magnet array is arranged at a first end of the array of electron beam columns. The plurality of shielding plates extend across the array electron beam columns downstream of the first permanent magnet array in a direction of electron emission. The array of electron beams pass through a plurality of apertures in each of the plurality of shielding plates, which reduces stray magnetic field in a radial direction of the array of electron beams.Type: ApplicationFiled: September 9, 2021Publication date: March 9, 2023Inventors: Qian Zhang, Wayne Chiwoei Lo, Joseph Maurino, Tomas Plettner
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Publication number: 20220310355Abstract: An aperture array for a multi-beam array system and a method of selecting a subset of a beam from a multi-beam array system are provided. The aperture array comprises an array body arranged proximate to a beam source. The array body comprises a plurality of apertures, at least two of the apertures having different geometries. The array body is movable, via an actuator, relative to an optical axis of the beam source, such that a subset of a beam from the beam source is selected based on the geometry of the aperture that is intersected by the optical axis.Type: ApplicationFiled: March 24, 2021Publication date: September 29, 2022Inventors: Tomas Plettner, Ernesto Escorcia, Sameet K. Shriyan, Jeong Ho Lee
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Publication number: 20220199352Abstract: A multi-beam electronics scanning system using swathing. The system includes an electron emitter source configured to emit an illumination beam. The illumination beam is split into multiple electron beams by a beam splitter lens array. The system also includes an electronic deflection system configured to deflect each of the electron beams in a plurality of directions, including a first direction, along two different axes. Last, a swathing stage is used to move a sample with a constant velocity in a second direction that is parallel to the first direction.Type: ApplicationFiled: December 1, 2021Publication date: June 23, 2022Applicant: KLA CorporationInventors: Tomas Plettner, Doug Larson, Mark Cawein, Jason W. Huang
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Publication number: 20210090844Abstract: A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly. The system also includes a source assembly, the source assembly including two or more illumination sources configured to generate two or more electron beams and two or more sets of a plurality of positioners configured to adjust a position of a particular illumination source of the two or more illumination sources in a plurality of directions. The system also includes a stage configured to secure a sample, where the column assembly directs at least a portion of the two or more electron beams onto a portion of the sample.Type: ApplicationFiled: November 16, 2020Publication date: March 25, 2021Inventors: Robert Haynes, Aron Welk, Tomas Plettner, John Gerling, Mehran Nasser Ghodsi
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Patent number: 10840056Abstract: A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly. The system also includes a source assembly, the source assembly including two or more illumination sources configured to generate two or more electron beams and two or more sets of a plurality of positioners configured to adjust a position of a particular illumination source of the two or more illumination sources in a plurality of directions. The system also includes a stage configured to secure a sample, where the column assembly directs at least a portion of the two or more electron beams onto a portion of the sample.Type: GrantFiled: June 2, 2017Date of Patent: November 17, 2020Assignee: KLA CorporationInventors: Robert Haynes, Aron Welk, Tomas Plettner, John Gerling, Mehran Nasser Ghodsi
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Patent number: 10354832Abstract: A multi-column scanning electron microscopy (SEM) system is disclosed. The SEM system includes a source assembly. The source assembly includes two or more electron beam sources configured to generate a plurality of electron beams. The source assembly also includes two or more sets of positioners configured to actuate the two or more electron beam sources. The SEM system also includes a column assembly. The column assembly includes a plurality of substrate arrays. The column assembly also includes two or more electron-optical columns formed by a set of column electron-optical elements bonded to the plurality of substrate arrays. The SEM system also includes a stage configured to secure a sample that at least one of emits or scatters electrons in response to the plurality of electron beams directed by the two or more electron-optical columns to the sample.Type: GrantFiled: June 7, 2017Date of Patent: July 16, 2019Assignee: KLA-Tencor CorporationInventors: Robert Haynes, John Gerling, Aron Welk, Christopher Sears, Felipe Fuks, Mehran Nasser-Ghodsi, Tomas Plettner
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Patent number: 10211021Abstract: A permanent-magnet particle beam apparatus and method incorporating a non-magnetic portion for tunability are provided. The permanent-magnet particle beam apparatus includes a particle beam emitter that emits a charged particle beam, and includes a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam. The permanent-magnet particle beam apparatus further includes a non-magnetic electrical conductor component situated with the set of permanent magnets to control a kinetic energy of the charged particle beam moving through the magnetic field.Type: GrantFiled: February 9, 2017Date of Patent: February 19, 2019Assignee: KLA-Tencor CorporationInventors: Tomas Plettner, John David Gerling, Mohammed Tahmassebpur
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Publication number: 20180358200Abstract: A multi-column scanning electron microscopy (SEM) system is disclosed. The SEM system includes a source assembly. The source assembly includes two or more electron beam sources configured to generate a plurality of electron beams. The source assembly also includes two or more sets of positioners configured to actuate the two or more electron beam sources. The SEM system also includes a column assembly. The column assembly includes a plurality of substrate arrays. The column assembly also includes two or more electron-optical columns formed by a set of column electron-optical elements bonded to the plurality of substrate arrays. The SEM system also includes a stage configured to secure a sample that at least one of emits or scatters electrons in response to the plurality of electron beams directed by the two or more electron-optical columns to the sample.Type: ApplicationFiled: June 7, 2017Publication date: December 13, 2018Inventors: Robert Haynes, John Gerling, Aron Welk, Christopher Sears, Felipe Fuks, Mehran Nasser-Ghodsi, Tomas Plettner
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Publication number: 20180226219Abstract: A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly. The system also includes a source assembly, the source assembly including two or more illumination sources configured to generate two or more electron beams and two or more sets of a plurality of positioners configured to adjust a position of a particular illumination source of the two or more illumination sources in a plurality of directions. The system also includes a stage configured to secure a sample, where the column assembly directs at least a portion of the two or more electron beams onto a portion of the sample.Type: ApplicationFiled: June 2, 2017Publication date: August 9, 2018Inventors: Robert Haynes, Aron Welk, Tomas Plettner, John Gerling, Mehran Nasser Ghodsi
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Publication number: 20170294286Abstract: A permanent-magnet particle beam apparatus and method incorporating a non-magnetic portion for tunability are provided. The permanent-magnet particle beam apparatus includes a particle beam emitter that emits a charged particle beam, and includes a set of permanent magnets forming a magnetic field for controlling condensing of the charged particle beam. The permanent-magnet particle beam apparatus further includes a non-magnetic electrical conductor component situated with the set of permanent magnets to control a kinetic energy of the charged particle beam moving through the magnetic field.Type: ApplicationFiled: February 9, 2017Publication date: October 12, 2017Inventors: Tomas Plettner, John David Gerling, Mohammed Tahmassebpur
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Patent number: 9513230Abstract: A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: December 3, 2013Date of Patent: December 6, 2016Assignee: KLA-TENCOR CORPORATIONInventors: John Gerling, Edward Wagner, Mehran Nasser-Ghodsi, Garrett Pickard, Tomas Plettner, Robert Haynes, Christopher Sears
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Patent number: 9418819Abstract: A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: September 3, 2014Date of Patent: August 16, 2016Assignee: KLA-TENCOR CORPORATIONInventors: John Gerling, Tomas Plettner, Mehran Nasser-Ghodsi
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Patent number: 9053833Abstract: An array of spatially separated beamlets is produced by a corresponding array of charged particle emitters. Each emitter is at an electrostatic potential difference with respect to an immediately adjacent emitter in the array. The beamlets are converged laterally to form an charged particle beam. The beam is modulated longitudinally with infrared radiation to form a modulated beam. The charged particles in the modulated beam are bunched longitudinally to form a bunched beam. The bunched beam may be modulated with an undulator to generate a coherent radiation output. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: February 27, 2013Date of Patent: June 9, 2015Assignee: KLA-Tencor Technologies, CorporationInventor: Tomas Plettner
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Publication number: 20150076697Abstract: A semiconductor device comprises a plurality of device features formed on a substrate and a plurality of dummy features formed on the substrate and across an open region between the device features. Adjacent device features are spaced apart by a distance of 100 microns or more. Each device feature includes a barrier island and a metal layer on top of the barrier island. Each dummy feature has a structure that corresponds to the structure of the barrier island. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: September 12, 2014Publication date: March 19, 2015Inventors: Tomas Plettner, Mehran Nasser-Ghodsi, John Gerling
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Publication number: 20150069234Abstract: A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: September 3, 2014Publication date: March 12, 2015Inventors: John Gerling, Tomas Plettner, Mehran Nasser-Ghodsi
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Publication number: 20140239805Abstract: An array of spatially separated beamlets is produced by a corresponding array of charged particle emitters. Each emitter is at an electrostatic potential difference with respect to an immediately adjacent emitter in the array. The beamlets are converged laterally to form an charged particle beam. The beam is modulated longitudinally with infrared radiation to form a modulated beam. The charged particles in the modulated beam are bunched longitudinally to form a bunched beam. The bunched beam may be modulated with an undulator to generate a coherent radiation output. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: February 27, 2013Publication date: August 28, 2014Applicant: KLA-Tencor CorporationInventor: TOMAS PLETTNER
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Publication number: 20140218503Abstract: A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: December 3, 2013Publication date: August 7, 2014Applicant: KLA-Tencor CorporationInventors: John Gerling, Edward Wagner, Mehran Nasser-Ghodsi, Garrett Pickard, Tomas Plettner, Robert Haynes, Christopher Sears
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Patent number: 8618513Abstract: One embodiment disclosed relates to an apparatus forming an electrical conduction path through an insulating layer on a surface of a substrate. A first radiation source is configured to emit radiation to a first region of the insulating layer, and a first electrical contact is configured to apply a first bias voltage to the first region. A second radiation source is configured to emit radiation to a second region of the insulating layer, and a second electrical contact is configured to apply a second bias voltage to the second region. The conductivities of the regions are increased by the radiation such that conductive paths are formed through the insulating layer at those regions. In one implementation, the apparatus may be used in an electron beam instrument. Another embodiment relates to a method of forming an electrical conduction path through an insulating layer. Other embodiments, aspects and features are also disclosed.Type: GrantFiled: May 10, 2012Date of Patent: December 31, 2013Assignee: KLA-Tencor CorporationInventors: Tomas Plettner, Mehran Nasser-Ghodsi, Robert G. Haynes, Rudy F. Garcia