Patents by Inventor Tomas RADLICKA

Tomas RADLICKA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron optical module for providing an off-axial electron beam with a tunable coma
    Patent number: 11804357
    Abstract: An electron optical module for providing an off-axial electron beam with a tunable coma, according to the present disclosure includes a structure positioned downstream of an electron source and an electron lens assembly positioned between the structure and the electron source. The structure generates a decelerating electric field, and is positioned to prevent the passage of electrons along the optical axis of the electron lens assembly. The electron optical module further includes a micro-lens that is not positioned on the optical axis of the electron lens assembly and is configured to apply a lensing effect to an off-axial election beam. Aberrations applied to the off-axial electron beam by the micro-lens and the electron lens assembly combine so that a coma of the off-axial beam has a desired value in a downstream plane.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: October 31, 2023
    Assignee: FEI Company
    Inventors: Ali Mohammadi-Gheidari, Peter Christiaan Tiemeijer, Alexander Henstra, Tomas Radlicka
  • ELECTRON OPTICAL MODULE FOR PROVIDING AN OFF-AXIAL ELECTRON BEAM WITH A TUNABLE COMA
    Publication number: 20230101108
    Abstract: An electron optical module for providing an off-axial electron beam with a tunable coma, according to the present disclosure includes a structure positioned downstream of an electron source and an electron lens assembly positioned between the structure and the electron source. The structure generates a decelerating electric field, and is positioned to prevent the passage of electrons along the optical axis of the electron lens assembly. The electron optical module further includes a micro-lens that is not positioned on the optical axis of the electron lens assembly and is configured to apply a lensing effect to an off-axial election beam. Aberrations applied to the off-axial electron beam by the micro-lens and the electron lens assembly combine so that a coma of the off-axial beam has a desired value in a downstream plane.
    Type: Application
    Filed: September 30, 2021
    Publication date: March 30, 2023
    Applicant: FEI Company
    Inventors: Ali MOHAMMADI-GHEIDARI, Peter Christiaan TIEMEIJER, Alexander HENSTRA, Tomas RADLICKA