Abstract: It is intended to provide an irradiation device that can achieve good starting performance even without encapsulating a starting performance promoting substance into the internal space of a luminous tube in a discharge lamp, and simultaneously, can distinguish whether the discharge lamp is a genuine product or not. An irradiation device (50) is composed of a discharge lamp (110) provided as a light source and an ultraviolet light source (200) irradiating ultraviolet light to the discharge lamp (110) to detect whether the discharge lamp (110) is a genuine product or not in activation of the discharge lamp (110).

Abstract: A light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration is provided. The light irradiation device is configured using a light source with a plurality of LEDs, and a polarizing element that receives light from the light source and applies the light transmitted through the polarizing element to a workpiece. An optical axis of each of the LEDs is set in such a manner as to have a first angle ?1 to the workpiece. A second angle ?2 as an angle half of a light distribution angle of the light emitted from each of the LEDs is set smaller than the first angle ?1.

Abstract: It is intended to provide an irradiation device that can achieve good starting performance even without encapsulating a starting performance promoting substance into the internal space of a luminous tube in a discharge lamp, and simultaneously, can distinguish whether the discharge lamp is a genuine product or not. An irradiation device (50) is composed of a discharge lamp (110) provided as a light source and an ultraviolet light source (200) irradiating ultraviolet light to the discharge lamp (110) to detect whether the discharge lamp (110) is a genuine product or not in activation of the discharge lamp (110).

Abstract: A light source is composed of a discharge lamp, a resistor and a reflector container. The discharge lamp is provided as a source of light. The resistor increases a resistance in elevation of a temperature thereof, and reduces the resistance in lowering of the temperature thereof. The reflector container is a constituent element to which the discharge lamp and the resistor are attached. Additionally, the resistor is caused to heat an outer surface of the reflector container in accordance with elevation of a temperature of the discharge lamp in activation of lighting of the discharge lamp.

Abstract: A light source is composed of a discharge lamp, a resistor and a reflector container. The discharge lamp is provided as a source of light. The resistor increases a resistance in elevation of a temperature thereof, and reduces the resistance in lowering of the temperature thereof. The reflector container is a constituent element to which the discharge lamp and the resistor are attached. Additionally, the resistor is caused to heat an outer surface of the reflector container in accordance with elevation of a temperature of the discharge lamp in activation of lighting of the discharge lamp.

Abstract: The present high-pressure discharge lamp is composed of an arc tube part having an internal space, a pair of tungsten electrodes disposed in opposition to each other within the internal space, and mercury and halogen encapsulated in the internal space. The halogen is excessively encapsulated into the internal space relatively to the capacity of the internal space so as to establish an appropriate halogen cycle when the mercury partially deposits without evaporating.

Abstract: The present high-pressure discharge lamp is composed of an arc tube part having an internal space, a pair of tungsten electrodes disposed in opposition to each other within the internal space, and mercury and halogen encapsulated in the internal space. The halogen is excessively encapsulated into the internal space relatively to the capacity of the internal space so as to establish an appropriate halogen cycle when the mercury partially deposits without evaporating.

Abstract: A high pressure discharge lamp with auxiliary lamp comprises: a high pressure discharge lamp having an arc tube and at least one sealing portion, a pair of main electrodes, and a pair of feeders supplying power to the main electrodes; an auxiliary lamp having an airtight case, an inner electrode, and an outer electrode, wherein the inner electrode is arranged at a position so as to part the inner space to large and small spaces, the outer electrode is arranged at a position so as to face the large space, the auxiliary lamp as arranged as the large space faces the sealing portion.

Abstract: A high pressure discharge lamp with auxiliary lamp comprises: a high pressure discharge lamp having an arc tube and at least one sealing portion, a pair of main electrodes, and a pair of feeders supplying power to the main electrodes; an auxiliary lamp having an airtight case, an inner electrode, and an outer electrode, wherein the inner electrode is arranged at a position so as to part the inner space to large and small spaces, the outer electrode is arranged at a position so as to face the large space, the auxiliary lamp as arranged as the large space faces the sealing portion.

Abstract: The light emitting device comprises: a bowl-shaped reflector; a point light source; and a combined lens provided on the light axis of the point light source. And the combined lens has: a convex lens part having a focal point coinciding with the point light source, refracting center light around the light axis into parallel light; and a concave lens part provided around the convex lens part, and refracting and diffusing light having an angle with the light axis larger than an angle between the center light and the light axis so as to increase the angle with the light axis. A virtual focal point of the light refracted and diffused with the concave lens part coincides with the focal point of the paraboloid of revolution.

Abstract: The light emitting device comprises: a bowl-shaped reflector; a point light source; and a combined lens provided on the light axis of the point light source. And the combined lens has: a convex lens part having a focal point coinciding with the point light source, refracting center light around the light axis into parallel light; and a concave lens part provided around the convex lens part, and refracting and diffusing light having an angle with the light axis larger than an angle between the center light and the light axis so as to increase the angle with the light axis. A virtual focal point of the light refracted and diffused with the concave lens part coincides with the focal point of the paraboloid of revolution.

Abstract: The light emitting device comprises a point light source, a solid and transparent light guide, a recess arranged on center of a light receiving surface of the light guide, a concave lens formed on a surface of the recess. A reflecting side surface is a revolving surface determined by revolving a parabola passing through one point of peripheral border of the light receiving surface and the other point of peripheral border of the light radiating surface, and having a focal point on the other point of peripheral border. The point light source is arranged apart from the light receiving surface so as to divide the light from the point light source into light entering into the light guide through the surface of the recess and light entering into the light guide through some part of the light receiving surface other than the recess.

Abstract: A light emitting device 10A comprises: a bowl-shaped reflector 12 having a focal point F; and illuminators 14 have LED elements 28 being square in planar view and lenses 30 forming virtual images I of the LED elements 28 behind the LED element 28; wherein a position of each of the virtual images I from the lens 30 is farther than a position of the focal point F from the lens 30; when a distance A between the virtual image I and the focal point F and a length of outer circumference B of the LED element 28 being square in planar view are assumed, a value of A divide B (A/B) is not less than 0.08 and not more than 0.42.

Abstract: The light emitting device comprises a point light source, a solid and transparent light guide, a recess arranged on center of a light receiving surface of the light guide, a concave lens formed on a surface of the recess. A reflecting side surface is a revolving surface determined by revolving a parabola passing through one point of peripheral border of the light receiving surface and the other point of peripheral border of the light radiating surface, and having a focal point on the other point of peripheral border. The point light source is arranged apart from the light receiving surface so as to divide the light from the point light source into light entering into the light guide through the surface of the recess and light entering into the light guide through some part of the light receiving surface other than the recess.

Abstract: The high-pressure discharge lamp includes: a pre-seal glass inserted in the internal space of each of seal portions and integrally comprising a metal foil sheathing portion which sheathes a metal foil, an electrode sheathing portion which sheathes a portion of an electrode that extends from a first end of the metal foil toward a base portion and an external lead pin sheathing portion which sheathes a portion of an external lead pin that extends outwardly from the other end of the metal foil; and a conductor for generating discharge between the conductor and the metal foil. The electrode sheathing portion is fused to the base portion. The external lead pin sheathing portion has an outer surface hermetically fused to an inner surface of one of the seal portions. A clearance hermetically sealed between the pre-seal glass and the seal portion encapsulates inert gas therein.

Abstract: The high-pressure discharge lamp includes: a pre-seal glass inserted in the internal space of each of seal portions and integrally comprising a metal foil sheathing portion which sheathes a metal foil, an electrode sheathing portion which sheathes a portion of an electrode that extends from a first end of the metal foil toward a base portion and an external lead pin sheathing portion which sheathes a portion of an external lead pin that extends outwardly from the other end of the metal foil; and a conductor for generating discharge between the conductor and the metal foil. The electrode sheathing portion is fused to the base portion. The external lead pin sheathing portion has an outer surface hermetically fused to an inner surface of one of the seal portions. A clearance hermetically sealed between the pre-seal glass and the seal portion encapsulates inert gas therein.

Abstract: This invention makes it possible to use a concave reflection mirror using metal in at least a concave reflective portion thereof for discharge lamps. The concave reflection mirror is characterized by including: a metallic concave reflective portion; and a neck portion for receiving therein a high voltage side seal portion of a high-pressure discharge lamp to be continuously applied with a d.c. voltage of 1000 V to 4000 V during an ignition phase, the neck portion protruding rearward from a central portion of the metallic concave reflective portion and being formed partially of an insulating member or entirely of an insulating material. The concave reflection mirror can have a concave reflective surface with improved curved surface precision thereby making it possible to reduce variations in brightness, use a multi-layered deposited film having a low heat resistance, and reduce the required cost considerably.

Abstract: An ultra-high pressure discharge lamp unit is provided which satisfies both of the demand for enhanced brightness and the demand for prolonged lifetime. The ultra-high pressure discharge lamp unit includes: a reflector having a concave reflective surface; an ultra-high pressure discharge lamp; and a translucent cover, the reflector having sidewall defining an exhaust vent hole opening into an air passage defined to extend along an external surface of the reflector. When air flows through the air passage, a flow rate difference results between the exterior and the interior of the reflector and, hence, the pressure exerted on the exterior along which air flows at a higher flow rate becomes lower than that exerted on the interior. Accordingly, heated air within the reflector is discharged out of the reflector through the exhaust vent hole by suction caused by the relatively low pressure.