Patents by Inventor Tomiichi MATSUI

Tomiichi MATSUI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Tape sticking apparatus and tape sticking method
    Patent number: 9738483
    Abstract: A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder configured to hold and rotate a substrate; and a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.
    Type: Grant
    Filed: May 22, 2015
    Date of Patent: August 22, 2017
    Assignees: Ebara Corporation, IS ENGINEERING CO., LTD.
    Inventors: Kenya Ito, Keisuke Uchiyama, Tomiichi Matsui, Mahito Shibuya
  • TAPE STICKING APPARATUS AND TAPE STICKING METHOD
    Publication number: 20160023861
    Abstract: A tape sticking apparatus for sticking a masking tape for protecting a peripheral portion of a substrate, such as a wafer, is disclosed. The tape sticking apparatus includes: a substrate holder configured to hold and rotate a substrate; and a tape sticking unit configured to stick a masking tape onto a peripheral portion of the substrate held on the substrate holder.
    Type: Application
    Filed: May 22, 2015
    Publication date: January 28, 2016
    Inventors: Kenya ITO, Keisuke UCHIYAMA, Tomiichi MATSUI, Mahito SHIBUYA