Patents by Inventor Tomio Konn
Tomio Konn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7072578Abstract: A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10?3 g/cm3 or less.Type: GrantFiled: January 21, 2005Date of Patent: July 4, 2006Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Norihiko Saito, Hiroyuki Honma, Hiroshi Mori, Eiichi Toya, Tomio Konn, Tomohiro Nagata, Sunao Seko, Akira Otsu, Takanori Saito, Ken Nakao, Kazutoshi Miura, Harunari Hasegawa, George Hoshi, Katsutoshi Ishi
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Patent number: 6961516Abstract: A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.Type: GrantFiled: March 30, 2004Date of Patent: November 1, 2005Assignee: Toshiba Ceramics Co., Ltd.Inventors: Eiichi Toya, Tomio Konn
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Publication number: 20050133494Abstract: A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10?3 g/cm3 or less.Type: ApplicationFiled: January 21, 2005Publication date: June 23, 2005Inventors: Norihiko Saito, Hiroyuki Honma, Hiroshi Mori, Eiichi Toya, Tomio Konn, Tomohiro Nagata, Sunao Seko, Akira Otsu, Takanori Saito, Ken Nakao, Kazutoshi Miura, Harunari Hasegawa, George Hoshi, Katsutoshi Ishi
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Patent number: 6885814Abstract: A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10?3 g/cm3 or less.Type: GrantFiled: March 25, 2003Date of Patent: April 26, 2005Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Takanori Saito, Hiroshi Mori, Akira Otsu, Norihiko Saito, Hiroyuki Honma, Eiichi Toya, Tomio Konn, Tomohiro Nagata, Ken Nakao, Kazutoshi Miura, Harunari Hasegawa, George Hoshi, Katsutoshi Ishi, Sunao Seko
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Publication number: 20040247302Abstract: A steam generating apparatus includes: a liquid tank portion 1 for storing a liquid; an evaporator portion 2 which is directly connected to the liquid tank portion, heats the liquid supplied from the liquid tank portion, and generates steam; a steam storage portion 3 which is directly connected to the evaporator portion, and stores the steam generated by the evaporator portion; a passageway 4 which is directly connected to the steam storage portion and outwardly passes the generated steam; a liquid pathway 10b which is connected to the liquid tank portion, and supplies the liquid; and a heater unit 20 which is provided on one side of the evaporator portion, and heats at least the evaporator portion. The liquid tank portion 1, the evaporator portion 2, the steam storage portion 3, the passageway 4, and the liquid pathway 10b are formed within an integral member of a translucent material.Type: ApplicationFiled: March 30, 2004Publication date: December 9, 2004Applicant: TOSHIBA CERAMICS CO., LTD.Inventors: Eiichi Toya, Tomio Konn
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Publication number: 20030180034Abstract: A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.Type: ApplicationFiled: March 25, 2003Publication date: September 25, 2003Applicants: TOSHIBA CERAMICS CO., LTD., TOKYO ELECTRON LIMITEDInventors: Takanori Saito, Hiroshi Mori, Akira Otsu, Norihiko Saito, Hiroyuki Honma, Eiichi Toya, Tomio Konn, Tomohiro Nagata, Ken Nakao, Kazutoshi Miura, Harunari Hasegawa, George Hoshi, Katsutoshi Ishi, Sunao Seko
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Patent number: 6584279Abstract: A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.Type: GrantFiled: May 25, 2001Date of Patent: June 24, 2003Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Sunao Seko, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Hideyuki Yokoyama, Masakazu Kobayashi, Takanori Saito, Ken Nakao
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Patent number: 6515264Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: GrantFiled: June 14, 2002Date of Patent: February 4, 2003Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6516143Abstract: The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.Type: GrantFiled: March 29, 2001Date of Patent: February 4, 2003Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Sunao Seko, Takanori Saito, Kazutoshi Miura, Harunari Hasegawa, Joji Hoshi, Katsutoshi Ishii
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Publication number: 20020162835Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: ApplicationFiled: June 14, 2002Publication date: November 7, 2002Applicant: TOSHIBA CERAMICS CO., LTDInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6407371Abstract: A rod-shaped heater provided is composed of a carbon wire heating element 2 sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions 3a and 3b charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section 10 having connection lines 11a and 11b for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.Type: GrantFiled: December 1, 1999Date of Patent: June 18, 2002Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Shigeru Yamamura, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Publication number: 20020023919Abstract: The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.Type: ApplicationFiled: March 29, 2001Publication date: February 28, 2002Applicant: TOSHIBA CERAMICS CO., LTD.Inventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Sunao Seko, Takanori Saito, Kazutoshi Miura, Harunari Hasegawa, Joji Hoshi, Katsutoshi Ishii
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Publication number: 20020001460Abstract: The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0 nm or more.Type: ApplicationFiled: May 25, 2001Publication date: January 3, 2002Applicant: TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITEDInventors: Sunao Seko, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Hideyuki Yokoyama, Masakazu Kobayashi, Takanori Saito, Ken Nakao
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Patent number: 6204488Abstract: A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.Type: GrantFiled: November 30, 1999Date of Patent: March 20, 2001Assignees: Toshiba Ceramics Co., Ltd, Tokyo Electron LimitedInventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Sunao Seko, Hideyuki Yokoyama, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
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Patent number: 6043468Abstract: A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.Type: GrantFiled: July 31, 1998Date of Patent: March 28, 2000Assignees: Toshiba Ceramics Co., Ltd., Tokyo Electron LimitedInventors: Eiichi Toya, Masahiko Ichishima, Tomio Konn, Tomohiro Nagata, Shigeru Yamamura, Norihiko Saito, Kouji Teraoka, Takeshi Inaba, Hiroyuki Honma, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya